A fully polymeric micropump with piezoelectric actuator

Sensors and Actuators, B: Chemical

Volumn 97, Issue 1, 2004, Pages 137-143

  Nguyen, Nam Trung ^a   Truong, Thai Quang ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Microfluidics; Micropumps; PMMA; Polymeric micromachining; SU 8

Indexed keywords

ACTUATORS; BIOCOMPATIBILITY; CHEMICAL RESISTANCE; ELASTIC MODULI; LAMINATING; LITHOGRAPHY; MICROMACHINING; PHOTORESISTORS; PIEZOELECTRIC MATERIALS; POLYMERS; POLYMETHYL METHACRYLATES; SILICON; SURFACE TENSION;

MICROFLUIDICS; MICROPUMPS;

PUMPS;

EID: 0346280064     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(03)00521-5     Document Type: Article

References (15)

1. N.T. Nguyen, S.T. Wereley, Fundamentals and Applications of Microfluidics, first ed., Artech House, Boston, MA, 2002.
2. Nguyen N.T., Huang X.Y., Toh K.C., MEMS-micropumps: a review. ASME Trans. J. Fluids Eng. 124:2002;384-392.
3. Rapp R., Schomburg W.K., Maas D., Schulz J., Stark W., LIGA micropump for gases and liquids. Sens. Actuators A. 40:1994;57-61.
4. Schomburg W.K., Fahrenberg J., Maas D., Rapp R., Active valves and pumps for microfluidics. J. Micromechanics Microeng. 3:1993;216-218.
5. Schomburg W.K., Vollmer J., Buestgens B., Fahrenberg J., Hein H., Menz W., Microfluidic components in LIGA technique. J. Micromechanics Microeng. 4:1994;186-191.
6. K.P. Kaemper, J. Doepper, W. Ehrfeld, S. Oberbeck, A Self Filling Low Cost Membrane Micropump, in: Proceedings of the 11th IEEE International Workshop on MEMS (MEMS'98), Heidelberg, 1998, pp. 432-437.
7. Boehm S., Olthuis W., Bergveld P., A plastic micropump constructed with conventional techniques and materials. Sens. Actuators A. 77:1999;223-228.
8. E. Meng, X. Q. Wang, H. Mak, Y. C. Tai, A Check-Valved Silicone Diaphragm Pump, in: Proceedings of 13th IEEE International Workshop on MEMS (MEMS'00), Heidelberg, 2000, pp. 23-27.
9. Santra S., Holloway P., Batich D., Fabrication and testing of a magnetically actuated micropump. Sens. Actuators B. 87:2002;358-364.
10. Nguyen N.T., Huang X.Y., Miniature valveless pumps based on printed circuit board technique. Sens. Actuators A. 88:2001;104-111.
11. L.L. Howell, Compliant Mechanisms, Wiley, New York, 2001.
12. Lorenz H., Despont M., Fahmi N., LaBianca N., Renaud P., Vettinger P., SU-8: a low-cost negative resist for MEMS. J. Micromechanics Microeng. 7:1997;121-124.
13. Ulrich J., Zengerle R., Static and dynamic flow simulation of a KOH-etched microvalve using the finite-element method. Sens. Actuators A. 53:1996;379-385.
14. M. Koch, A.G.R. Evan, A. Brunnschweiler, Coupled FEM simulation for the characterization of the fluid flow within a micromachined cantilever valve, in: Proceeding of Micromechanics Europe, Copenhagen, 1995, pp. 160-163.
15. SU-8 2000 Datasheets, Microchem Corp Website, http://www.microchem.com .