Surface micromachined paraffin-actuated microvalve

Journal of Microelectromechanical Systems

Volumn 11, Issue 5, 2002, Pages 408-420

  Carlen, Edwin T ^b   Mastrangelo, Carlos H ^a,b,c  

^a IEEE   (United States)

^b Corning IntelliSense Corporation ^*  (United States)

^c UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Microflow control; Microvalves; Paraffin microactuators

Indexed keywords

GAS FLOW RATES; GLASS SUBSTRATES; MICROFABRICATION TECHNOLOGIES; MICROFLOW CONTROL; MICROFLOW DEVICES; MICROVALVE;

FLOW CONTROL; FLOW MEASUREMENT; MICROACTUATORS; MICROELECTRONIC PROCESSING; MICROMACHINING; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DEVICE TESTING; VALVES (MECHANICAL);

MICROELECTROMECHANICAL DEVICES;

EID: 0036772241     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.803288     Document Type: Article

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