Development of Si-SiC hybrid structures for elevated temperature micro-turbomachinery

Journal of Microelectromechanical Systems

Volumn 13, Issue 4, 2004, Pages 676-687

  Moon, Hyung Soo ^a   Choi, Dongwon ^a   Spearing, S Mark ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BRITTLENESS; CHEMICAL VAPOR DEPOSITION; DUCTILITY; FINITE ELEMENT METHOD; HIGH TEMPERATURE PROPERTIES; MATHEMATICAL MODELS; MECHANICAL TESTING; SILICON; SILICON CARBIDE; STRUCTURE (COMPOSITION); TURBOMACHINERY;

HYBRID SPOOL DESIGN; HYBRID STRUCTURES; MICROENGINE; MICROTUBOMACHINERY; STRAIN SOFTENING; THERMAL SOFTENING;

MICROELECTROMECHANICAL DEVICES;

EID: 4344674034     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.832182     Document Type: Article

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