Development of large flow rate, robust, passive micro check valves for compact piezoelectrically actuated pumps

Sensors and Actuators, A: Physical

Volumn 117, Issue 2, 2005, Pages 325-330

  Li, Bo ^a   Chen, Quanfang ^a   Lee, Dong Gun ^b   Woolman, Jason ^b   Carman, Greg P ^b  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Electroforming; High frequency; High pressure; Hydraulic actuator; Large flow rate; Microvalve and array

Indexed keywords

HIGH FREQUENCY; HYDRAULIC ACTUATORS; LARGE FLOW RATE; MICROVALVE AND ARRAYS;

ACTUATORS; ELECTROFORMING; NATURAL FREQUENCIES; PRESSURE EFFECTS; ROBUSTNESS (CONTROL SYSTEMS); SHAPE MEMORY EFFECT;

PIEZOELECTRICITY;

EID: 69749112714     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.06.029     Document Type: Article

References (19)

1. Q. Chen, D.-J. Yao, C.-J. Kim, G.P. Carman, Mesoscale actuator device: micro interlocking mechanism to transfer macro load, Sens. Actuators 73 (1999) 30-36.
2. I. Chakraboty, W.C. Tang, D.P. Bame, T.K. Tang, MEMSD microvalve for space applications, Sens. Actuators 83 (2000) 188-193.
3. P.P. Friedmann, T.A. Millott, Vibration reduction in rotorcraft using active control: a comparison of various approaches, J. Guidance Control Dynam. 18 (4) (1995) 664-673.
4. ZHA Inc. Report, Cape Canaveral Spaceport Master Plan, The Vision, July 2002 (unpublished).
5. R. Jebens, W. Trimmer, J. Walker, Microactuators for aligning optical fibers, Sens. Actuators 20 (1-2) (1989) 65-74.
6. E.P. Muntz, W.C. Reynolds, T.W. Kenny, Transient pressure driven microdevices, micromechanical systems, ASME DSC 40 (1992) 103-118.
7. A.P. Dorey, J.H. Moore, Advances in Actuators, Institute of Physics Publishing, 1995.
8. G. Kovacs, Micromachined Transducer Sourcebook, WCB/McGraw-Hill, New York, 1998, ISBN 0-07-116462-6.
9. M. Madou, Fundamentals of Microfabrication, CRC Press, Boca Raton, 2002, ISBN 0-8493-0826-7.
10. W.S. Trimmer, Microrobots and micromechanical systems, Sens. Actuators 19 (1989) 267-287.
11. M. Kohl, D. Dittmann, E. Quandt, B. Winzek, Thin film shape memory microvalves with adjustable operation temperatures, Sens. Actuators A 83 (2000) 214-219.
12. K. Hosokawa, R. Maeda, Low-cost technology for high-density microvalve arrays using polydimethylsiloxane (PDMS), IEEE International Conference of Micro-electro-mechanical-Systems (MEMS), 2001, pp. 531-534.
13. K. Ikuta, T. Hasegawa, T. Adachi, SMA micro pumps and switching valves for biochemical IC family, International Symposium on Micromechanics and Human Science, 2000, pp. 169-174.
14. J. Shinohara, M. Suda, K. Furuta, T. Sakuhara, A high pressure-resistance micropump using active and normally-closed valves, IEEE International Conference of Micro-electro-mechancial-systems (MEMS), 2000, pp. 86-91.
15. J.G. Smits, Piezoelectric micropump with microvalves, IEEE International Conference of Micro-electro-mechancial-systems (MEMS), 1989, pp. 92-94.
16. D.E. Wroblewski, MEMS micro-valve arrays for fluidic control, ASME International Mechanical Engineering Congress and Exposition, DSC, vol. 66, 1998, pp. 145-151.
17. K. Nandakumar, A.G. Parr, G. Hahm, M.A. Huff, S.M. Phillips, A smart shape memory alloy actuated microvalve with feedback control, International Mechanical Engineering Congress and Exposition, DSC 66 (1998) pp. 139-143.
18. W. van der Wijngaart, H. Andersson, P. Enoksson, K. Noren, G. Stemme, The first self-priming and bi-directional valve-less diffuser micropump for both liquid and gas, IEEE International Conference of Micro-electro-mechancial- systems (MEMS), 2000, pp. 674-679.
19. H.A. Hunnicutt, Pilot operated microvalve device, US Patent 6540203.