Micromachined flat-walled valveless diffuser pumps

Journal of Microelectromechanical Systems

Volumn 6, Issue 2, 1997, Pages 161-166

  Olsson, Anders ^a   Enoksson, Peter ^a   Stemme, Göran ^a   Stemme, Erik ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Deep reactive ion etching; Diffuser; Micropump; Nozzle; Valueless diffuser pump

Indexed keywords

DIFFUSERS (FLUID); MICROELECTROMECHANICAL DEVICES; NOZZLES; PIEZOELECTRIC DEVICES; REACTIVE ION ETCHING; SILICON WAFERS;

MICROPUMPS;

PUMPS;

EID: 0031165299     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.585794     Document Type: Article

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