Development of stress-optimised shape memory microvalves

Sensors and Actuators, A: Physical

Volumn 72, Issue 3, 1999, Pages 243-250

  Kohl, M ^a   Skrobanek, K D ^a   Miyazaki, S ^b  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

Microvalves; Pressure compensation; Shape memory effect; Stress optimisation

Indexed keywords

FATIGUE OF MATERIALS; INTELLIGENT MATERIALS; MICROELECTROMECHANICAL DEVICES; PHASE TRANSITIONS; PRESSURE CONTROL; SHAPE MEMORY EFFECT; STRESS ANALYSIS; STRESS CONCENTRATION;

MICROVALVES;

VALVES (MECHANICAL);

EID: 0033079892     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00221-0     Document Type: Article

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