A MEMS microvalve with PDMS diaphragm and two-chamber configuration of thermo-pneumatic actuator for integrated blood test system on silicon

Sensors and Actuators, A: Physical

Volumn 119, Issue 2, 2005, Pages 468-475

  Takao, Hidekuni ^a   Miyamura, Kazuhiro ^b   Ebi, Hiroyuki ^b   Ashiki, Mitsuaki ^a   Sawada, Kazuaki ^a   Ishida, Makoto ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

^b HORIBA LTD   (Japan)

Author keywords

Blood test; In channel; Microvalve; PDMS; Thermo pneumatic actuator

Indexed keywords

BLOOD; DIAPHRAGMS; FLOW CONTROL; HEAT TRANSFER; MICROELECTROMECHANICAL DEVICES; ORGANIC POLYMERS; PNEUMATIC EQUIPMENT; SILICON; VALVES (MECHANICAL);

BLOOD TEST; IN-CHANNEL; MICROVALVES; POLYDIMETHYLSILOXANE (PDMS); THERMO-PNEUMATIC ACTUATORS;

ACTUATORS;

EID: 17044413727     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.10.023     Document Type: Article

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