A silicon-on-insulator based micro check valve

Journal of Micromechanics and Microengineering

Volumn 14, Issue 3, 2004, Pages 382-387

  Hu, Min ^a   Du, Hejun ^a   Ling, Shih Fu ^a   Fu, Yongqing ^a   Chen, Quanfang ^b   Chow, Louis ^b   Li, Bo ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHECK VALVES; HEXAGONAL MEMBRANE FLAPS;

COMPUTER SIMULATION; FINITE ELEMENT METHOD; FREQUENCIES; FREQUENCY RESPONSE; INTEGRATED CIRCUITS; MICROMACHINING; PHOTOLITHOGRAPHY; PRESSURE EFFECTS; REACTIVE ION ETCHING; RECIPROCATING PUMPS; RESONANCE; VALVES (MECHANICAL);

SILICON ON INSULATOR TECHNOLOGY;

EID: 1642634567     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/3/010     Document Type: Article

References (7)

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