Numerical and experimental studies of flat-walled diffuser elements for valve-less micropumps

Sensors and Actuators, A: Physical

Volumn 84, Issue 1, 2000, Pages 165-175

  Olsson, Anders ^a   Stemme, Göran ^a   Stemme, Erik ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CHANNEL FLOW; COMPUTATIONAL FLUID DYNAMICS; COMPUTER SIMULATION; FLOW MEASUREMENT; NOZZLES; PRESSURE DROP; REYNOLDS NUMBER; STEADY FLOW; WALL FLOW;

FLAT WALLED DIFFUSER ELEMENT; FLOW DIRECTING CAPABILITY; VALVE LESS MICROPUMPS;

DIFFUSERS (FLUID);

EID: 0034251181     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00320-9     Document Type: Article

References (30)

1. Stemme E., Stemme G. A valve-less diffuser/nozzle based fluid pump. Sensors and Actuators, A. 39:1993;159-167.
2. Gerlach T., Schuenemann M., Wurmus H. A new micropump principle of the reciprocating type using pyramidic micro flow channels as passive valves. Journal of Micromechanics and Microengineering. 5:1995;199-201.
3. F.K. Forster, L. Bardell, M.A. Afromowitz, N.R. Sharma, A. Blanchard, Design, fabrication and testing of fixed-valve micro-pumps, Proceedings of the ASME Fluids Engineering Division ASME 1995, FED-Vol. 234, 1995 IMECE, 1995, pp. 39-44.
4. F.C.M. van de Pol, A pump based on micro-engineering techniques, Thesis, University of Twente, Enschede, the Netherlands, 1989.
5. L. Smith, Micromachined nozzles fabricated with replicative method, Micromechanics Europe 1990 (MME '90), Berlin, Germany, 26-27 November, 1990, pp. 53-57.
6. E. Stemme, G. Stemme, A novel piezoelectric valve-less fluid pump, the 7th International Conference on Solid-State Sensors and Actuators (Transducers 93), Yokohama, Japan, June 7-10, 1993, pp. 110-113.
7. E. Stemme, G. Stemme, Valve-Less Fluid Pump, Swedish Patent Appl. No. 9 300 604-7, 1993.
8. Gerlach T., Wurmus H. Working principle and performance of the dynamic micropump. Sensors and Actuators, A. 50:1995;135-140.
9. N. Tesla, Valvular Conduit, United States Patent Office, 1 329 559, 1920.
10. Tsui Y.-Y., Wang C.-K. Calculation of laminar separated flow in symmetric two-dimensional diffusers. ASME Journal of Fluids Engineering. 117:1995;612-616.
11. H. Schlichting, Boundary-Layer Theory, 7th edn., McGraw-Hill, New York, 1979.
12. D.S. Miller, Internal Flow Systems, 2nd edn., Gulf Publishing, Houston, TX, 1990.
13. Olsson A., Stemme G., Stemme E. A valve-less planar fluid pump with two pump chambers. Sensors and Actuators, A. 46-47:1995;549-556.
14. Olsson A., Stemme G., Stemme E. Diffuser-element design investigation for valve-less pumps. Sensors and Actuators, A. 57:1996;137-143.
15. Heschel M., Müllenborn M., Bouwstra S. Fabrication and characterization of truly 3-D diffuser/nozzle microstructures in silicon. Journal of Microelectromechanical Systems. 6:1997;41-47.
16. X.N. Jiang, Z.Y. Zhou, J. Yao, Y. Li, X.Y. Ye, Micro-fluid flow in microchannel, Transducers 95-Eurosensor IX, Stockholm, Sweden, June 25-29, 1995, pp. 317-320.
17. Olsson A., Enoksson P., Stemme G., Stemme E. Micromachined flat-walled valve-less diffuser pumps. Journal of Microelectromechanical Systems. 6:1997;161-166.
18. Olsson A., Enoksson P., Stemme G., Stemme E. A valve-less planar pump isotropically etched in silicon. Journal of Micromechanics and Microengineering. 6:1996;87-91.
19. F.M. White, Fluid Mechanics, McGraw-Hill, New York, 1986.
20. P.W. Runstadler, F.X. Dolan, R.C. Dean, Diffuser Data Book, Creare, Hanover, NH, 1975.
21. Koch M., Evans A.G.R., Brunnschweiler A. The dynamic micropump driven with screen printed PZT actuator. Journal of Micromechanics and Microengineering. 8:1998;119-122.
22. Gerlach T. Microdiffusers as dynamic passive valves for micropump applications. Sensors and Actuators, A. 69:1998;181-191.
23. A. Olsson, G. Stemme, E. Stemme, Simulation Studies of Diffuser and Nozzle Elements for Valve-less Micropumps, the 10th International Conference on Solid-State Sensors and Actuators (Transducers 97), Chicago, USA, June 15-19, 1997, pp. 1039-1042.
24. A. Olsson, G. Stemme, E. Stemme, Numerical Simulation of Flat-walled Diffuser Elements for Valveless Micropumps, the 2nd International Conference on Modeling and Simulations of Microsystems (MSM 99), San Juan, Puerto Rico, USA, April 19-21, 1999, pp. 585-588.
25. Ulrich J., Zengerle R. Static and dynamic flow simulation of a KOH-etched microvalve using the finite-element method. Sensors and Actuators, A. 53:1996;379-385.
26. Webster's Ninth New Collegiate Dictionary, 1988.
27. Gravesen P., Brandebjerg J., Jensen O.S. Microfluidics - a review. Journal of Micromechanics and Microengineering. 3:1993;168-182.
28. ANSYS CFD FLOTRAN Analysis Guide Release 5.3, 1st edn., ANSYS, Houston, PA, 1996.
29. Nagano Y., Hishida M. Improved form of the k- epsilon model for wall turbulent shear flows. ASME Journal of Fluids Engineering. 109:1987;156-160.
30. Lai Y.G., So R.M.C., Hwang B.C. Calculation of planar and conical diffuser flows. AIAA Journal. 27:1989;542-548.