Designing, simulation and realization of in-plane operating micro valves, using new etching techniques

Journal of Micromechanics and Microengineering

Volumn 9, Issue 2, 1999, Pages 194-198

  Oosterbroek, R E ^a   Berenschot, J W ^a   Schlautmann, S ^a   Krijnen, G J M ^a   Lammerink, T S J ^a   Elwenspoek, M C ^a   Van Den Berg, A ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DESIGN; ETCHING; FABRICATION; MATHEMATICAL MODELS; MECHANICAL VARIABLES MEASUREMENT; VALVES (MECHANICAL);

MICROSYSTEMS; MICROVALVES; WET CHEMICAL ETCHING;

MICROELECTROMECHANICAL DEVICES;

EID: 0033138324     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/9/2/322     Document Type: Article

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