An electrostatically actuated polymer microvalve equipped with a movable membrane electrode

Journal of Micromechanics and Microengineering

Volumn 7, Issue 3, 1997, Pages 224-226

  Goll, C ^a   Bacher, W ^a   Bustgens B ^a,b   Maas, D ^a   Ruprecht, R ^a   Schomburg, W K ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; POLYMERS; SILICON WAFERS;

MICROVALVES; MOVABLE MEMBRANE ELECTRODES;

VALVES (MECHANICAL);

EID: 0031224570     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/7/3/038     Document Type: Article

References (11)

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