A phase-change type micropump with aluminum flap valves

Journal of Micromechanics and Microengineering

Volumn 13, Issue 2, 2003, Pages 286-294

  Sim, Woo Young ^a   Yoon, Hyeun Joong ^a   Jeong, Ok Chan ^a   Yang, Sang Sik ^a  

^a Ajou University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DIAPHRAGMS; DIFFUSION; ETCHING; EVAPORATION; PUMPS; VALVES (MECHANICAL);

MICROPUMPS;

COMPOSITE MICROMECHANICS;

EID: 0037340987     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/2/317     Document Type: Article

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