A MEMS thermopneumatic silicone rubber membrane valve

Sensors and Actuators, A: Physical

Volumn 64, Issue 1, 1998, Pages 101-108

  Yang, Xing ^a   Grosjean, Charles ^a   Tai, Yu Chong ^a   Ho, Chih Ming ^b  

^a California Institute of Technology   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Silicone rubber membranes; Thermopneumatic actuation; Valves

Indexed keywords

ELASTIC MODULI; ELASTICITY; FABRICATION; MECHANICAL PERMEABILITY; POLYMERIC MEMBRANES; SEALING (CLOSING); SILICON WAFERS; SILICONES; VALVES (MECHANICAL);

SILICONE RUBBER MEMBRANES; THERMOPNEUMATIC ACTUATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0031674003     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01660-9     Document Type: Article

References (7)

1. P.W. Barth, Silicon microvalve for gas flow control, Tech. Digest, 8th International Conference Solid-State Sensors and Actuators (Transducers '95/Eurosensors IX), Stockholm, Sweden, 25-29 June, 1995, Vol. 2, pp. 276-279.
2. C. Vieider, O. Ohman and H. Elderstig, A pneumatically actuated microvalve with a silicone rubber membrane for integration with fluid handling systems, Tech. Digest, 8th Int. Conf. Solid-State Sensors and Actuators (Transducers '95/Eurosensors IX), Stockholm, Sweden, 25-29 June, 1995, Vol. 2, pp. 284-286.
3. L. Bousse, E. Dijkstra and O. Guenat, High-density Arrays of valves and interconnects for liquid switching, Tech. Digest, Solid State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 1996, pp. 272-275.
4. M. Zdeblick, R. Anderson, J. Janskowski, B. Kline-Schoder, L. Christel, R. Miles and W. Weber, Thermopneumatically actuated microvalves and integrated electro-fluidic circuits, Tech. Digest, Solid State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 1994, pp. 251-255.
5. O. Tabata, K. Kawahata, S. Sugiyama and I. Igarashi, Mechanical property measurements of thin films using load deflection of composite rectangular membranes, Sensors and Actuators, 20 (1989) 135-141.
6. X.Q. Wang, X. Yang, K. Walsh and Y.-C. Tai, Gas phase silicon etching with bromine trifluoride, Tech. Digest, 9th Int. Conf. on Solid-State Sensors and Actuators (Transducers '97), Chicago, June 1997, Vol. 2, pp. 1505-1508.
7. M.J. Zdeblick, A planar process for an electric-to-fiuidic valve, Ph.D. Dissertation, Stanford University (June 1988).