A MEMS thermopneumatic silicone rubber membrane valve

Sensors and Actuators, A: Physical

Volumn 64, Issue 1, 1998, Pages 101-108

  Yang, Xing ^a   Grosjean, Charles ^a   Tai, Yu Chong ^a   Ho, Chih Ming ^b  

^a California Institute of Technology ^*  (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Silicone rubber membranes; Thermopneumatic actuation; Valves

Indexed keywords

ELASTIC MODULI; ELASTICITY; FABRICATION; MECHANICAL PERMEABILITY; POLYMERIC MEMBRANES; SEALING (CLOSING); SILICON WAFERS; SILICONES; VALVES (MECHANICAL);

SILICONE RUBBER MEMBRANES; THERMOPNEUMATIC ACTUATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0031674003     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01660-9     Document Type: Article

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