A low pressure micromachined flow modulator

Sensors and Actuators, A: Physical

Volumn 71, Issue 1-2, 1998, Pages 98-106

  Robertson, J K ^a   Wise, Kensall D ^b  

^a LAFAYETTE COLLEGE   (United States)

^b University of Michigan   (United States)

Author keywords

Electrostatic actuation; Gas flow; Micromachining; Microvalve; Molecular flow; Sensors

Indexed keywords

CHANNEL FLOW; FLOW CONTROL; MICROACTUATORS; MICROMACHINING; PRESSURE CONTROL; PRESSURE RELIEF VALVES;

FLOW MODULATORS; MICROVALVES; PRESSURE SENSORS;

MICROSENSORS;

EID: 0032208479     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00160-5     Document Type: Article

References (27)

1. J.K. Robertson received the BSEE and MSEE degrees from Texas A&M University, College Station, TX, in 1983 and 1986, respectively. From 1986 to 1989 she was employed as a linear BJT circuit designer at Honeywell in Richardson, TX. She was employed at Rose-Hulman Institute of Technology for two quarters during the 1989-1990 school year, as a lecturer in the Electrical Engineering department. She received the Ph.D. degree in Electrical Engineering from the University of Michigan in May, 1996. In the Fall of 1996, she became an assistant professor of Electrical Engineering at Lafayette College in Easton, PA.
2. Kensall D. Wise received the BSEE degree from Purdue University, West Lafayette, IN, in 1963, and the MSEE and Ph.D. degrees in Electrical Engineering from Stanford University, Stanford, CA, in 1964 and 1969, respectively. From 1969 to 1972 he was a research associate at Stanford, and from 1972 to 1974 he was on the technical staff at Bell Telephone Laboratories, Naperville, IL. In 1974, he joined the Department of Electrical Engineering and Computer Science at the University of Michigan, where he is now professor and director of the Center for Integrated Sensors and Circuits.
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