Polymer micro valve with a hydraulic piezo-drive fabricated by the AMANDA process

Sensors and Actuators, A: Physical

Volumn 110, Issue 1-3, 2004, Pages 206-212

  Rogge, Tilmann ^a   Rummler, Zeno ^a   Schomburg, Werner Karl ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

AMANDA process; Hydraulic; Microvalve; Polymer

Indexed keywords

ELECTRIC CONDUCTORS; ELECTRIC POTENTIAL; ELECTRIC TRANSFORMERS; HYDRAULIC DRIVES; MICROACTUATORS; MICROMACHINING; PIEZOELECTRIC DEVICES; POLYMERS; SEALING (CLOSING); SENSORS; SILICONES; TRANSISTORS;

AMANDA PROCESS; MICROFLUIDIC SYSTEMS; MICROVALVE; POWER CONSUMPTION;

SWITCHING SYSTEMS;

EID: 1642525680     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.10.056     Document Type: Conference Paper

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