A disposable thermopneumatic-actuated microvalve stacked with PDMS layers and ITO-coated glass

Microelectronic Engineering

Volumn 73-74, Issue , 2004, Pages 864-869

  Kim, Jin Ho ^a   Na, Kwang Ho ^a   Kang, C J ^a   Jeon, D ^b   Kim, Yong Sang ^a  

^a Myong Ji University   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

ITO heater; Membrane; Microvalve; PDMS; Thermopneumatic actuation

Indexed keywords

ACTUATORS; COATED MATERIALS; ELECTROSTATICS; FABRICATION; INDIUM COMPOUNDS; MEMBRANES; OXIDES; SILICON; SWITCHING SYSTEMS; TIN COMPOUNDS;

ITO HEATER; MICROVALVE; PDMS; THERMOPNEUMATIC-ACTUATION;

VALVES (MECHANICAL);

EID: 2542425060     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(04)00235-7     Document Type: Conference Paper

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