Micromachined silicon valve driven by a miniature bi-stable electro-magnetic actuator

Sensors and Actuators, A: Physical

Volumn 80, Issue 1, 2000, Pages 77-83

  Bohm S ^a   Burger, G J ^a   Korthorst, M T ^b   Roseboom, F ^c  

^a Minitec   (Netherlands)

^b PO Box 318 7500 AH   (Netherlands)

^c PO Box 45 7570 AA   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SOFTWARE; ETCHING; FINITE ELEMENT METHOD; MICROACTUATORS; MICROMACHINING; PERMANENT MAGNETS; SILICON WAFERS;

ELECTROMAGNETIC ACTUATORS; MICROVALVES;

VALVES (MECHANICAL);

EID: 0042898614     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00298-8     Document Type: Article

References (9)

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