Fabrication of a high frequency piezoelectric microvalve

Sensors and Actuators, A: Physical

Volumn 111, Issue 1, 2004, Pages 51-56

  Li, H Q ^a   Roberts, D C ^b   Steyn, J L ^a   Turner, K T ^a   Yaglioglu, O ^a   Hagood, N W ^b   Spearing, S M ^a   Schmidt, M A ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b Photonic Systems Inc   (United States)

Author keywords

Hydraulic amplification; MEMS; Microvalve; Multilayer; Piezoelectric

Indexed keywords

ACTUATORS; BONDING; FLOW OF FLUIDS; HYDRAULICS; MULTILAYERS; PIEZOELECTRIC DEVICES; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS;

MICROVALVES; WAFER-LEVEL FUSION BONDING;

MICROELECTROMECHANICAL DEVICES;

EID: 0442311891     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.10.013     Document Type: Conference Paper

References (9)

1. N.W. Hagood, D.C. Roberts, L. Saggere, K.S. Breuer, K.-S. Chen, J.A. Carretero, H.Q. Li, R. Mlcak, S. Pulitzer, M.A. Schmidt, S.M. Spearing, Y.-H. Su, Micro hydraulic transducer technology for actuation and power generation, in: Proceedings of the SPIE Seventh Annual International Symposium on Smart Structures and Materials, vol. 3985, Newport Beach, CA, 5-9 March 2000, pp. 680-688.
2. Shoji S., Esashi M. Microflow devices and systems. J. Micromech. Microeng. 4:1994;157-171.
3. van Lintel H., van de Pol F., Bouwstra A. piezoelectric micropump based on micromachining of silicon. Sens. Actuators. 15:1988;153-167.
4. Gasss V., van der Schoot B., Jeanneret S., de Rooij N. Integrated flow-regulated silicon micropump. Sens. Actuators A. 43:1994;335-338.
5. Koch M., Evans A.G.R., Brunnschweiler A. The dynamic micropump driven with a screen printed PZT actuator. J. Micromech. Microeng. 8:1998;119.
6. Roberts D.C., Li H.Q., Steyn J.L., Yaglioglu O., Spearing S.M., Schmidt M.A., Hagood N.W. A piezoelectric microvalve for compact high-frequency, high differential pressure micropumping systems. J. Microelectromech. Syst. 12(1):2003;81-92.
7. J.L. Steyn, H.Q. Li, D.C. Roberts, R. Mlcak, K.T. Turner, O. Yaglioglu, Y.-S. Su, M.A. Schmidt, S.M. Spearing, N.W. Hagood, Hydraulic amplification devices for microscale actuation, in: Proceedings of the IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC, 4-7 June 2002, pp. 50-54.
8. Despont M., Gross H., Arrouy F., Stebler C., Staufer U. Fabrication of a silicon-Pyrex-silicon stack by ac anodic bonding. Sens. Actuators A. 55:1996;219-224.
9. K.T. Turner, R. Mlcak, D.C. Roberts, S.M. Spearing, Bonding of bulk piezoelectric material to silicon using a gold tin eutectic bond, in: Proceedings of the Materials Research Society Symposium, vol. 687, 2002, B3.2.1-6.