Microvalves with bistable buckled polymer diaphragms

Journal of Micromechanics and Microengineering

Volumn 6, Issue 1, 1996, Pages 77-79

  Goll, C ^a   Bacher, W ^a   Bustgens B ^a   Maas, D ^a   Menz, W ^a   Schomburg, W K ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BUCKLING; DIAPHRAGMS; MICROELECTROMECHANICAL DEVICES; POLYIMIDES; PRESSURE CONTROL; THERMAL EXPANSION;

BISTABLE BUCKLED DIAPHRAGMS; MICROVALVES;

VALVES (MECHANICAL);

EID: 0030091840     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/1/017     Document Type: Article

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