A polymeric piezoelectric micropump based on lamination technology

Journal of Micromechanics and Microengineering

Volumn 14, Issue 4, 2004, Pages 632-638

  Truong, Thai Quang ^a   Nguyen, Nam Trung ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

MICROPUMPS; POLYMETHYLMETHACRYLATE; PUMP MEMBRANE; SACRIFICIAL MATERIAL;

ADHESIVE JOINTS; ELECTRON TUBES; LAMINATING; LASER ACCESSORIES; LAYERED MANUFACTURING; MICROACTUATORS; PIEZOELECTRIC MATERIALS; SILICON; SPRINGS (COMPONENTS);

MICROELECTROMECHANICAL DEVICES;

EID: 2342561174     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/4/026     Document Type: Article

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