Fabrication of micro electro-rheological valves (ER valves) by micromachining and experiments

Sensors and Actuators, A: Physical

Volumn 95, Issue 2-3, 2002, Pages 227-233

  Yoshida, K ^a   Kikuchi, M ^a   Park, J H ^a   Yokota, S ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

ER effect; ER fluids; Homogeneous; Micromachine; Micromachining; Microvalve

Indexed keywords

HYDRAULIC FLUIDS; MICROACTUATORS; MICROMACHINING; POSITION CONTROL; RHEOLOGY;

ELECTRORHEOLOGICAL VALVES; MICROVALVES;

MICROCONTROLLERS;

EID: 0036144467     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00730-0     Document Type: Article

References (8)

1. An in-pipe mobile micromachine using fluid power adaptable to pipe diameters
2. An in-pipe mobile micromachine using fluid power traversable branched pipes
3. Micro in-pipe mobile micromachines by making use of an electro-rheological fluid
4. An electronically controlled shock absorber using electrorheological fluid
5. A preliminary parametric study of electrorheological dampers
6. Testing of a high speed clutch
7. Resonantly driven piezoelectric micropump
8. Micro ER valve using homogeneous ER fluids and its application to micro fluid control system