Miniaturization of pinch-type valves and pumps for practical micro total analysis system integration

Journal of Micromechanics and Microengineering

Volumn 15, Issue 12, 2005, Pages 2449-2455

  Oh, Kwang W ^a,b   Rong, Rong ^a   Ahn, Chong H ^a  

^a 705 Engineering Research Center   (United States)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CONTAMINATION; LEAKAGE (FLUID); MAGNETIC DEVICES; PUMPS; SEMICONDUCTOR DEVICES; SILICONES; SOLENOIDS; VALVES (MECHANICAL);

BACK PRESSURE; LAB-ON-A-CHIP (LOC) DEVICES; LEAKAGE FLOW; MICROFLUIDIC DEVICES;

MICROMACHINING;

EID: 27944469459     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/15/12/029     Document Type: Article

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