Thermal micro pumps for a loop-type micro channel

Sensors and Actuators, A: Physical

Volumn 111, Issue 1, 2004, Pages 123-128

  Yokoyama, Yoshinori ^a   Takeda, Munehisa ^a   Umemoto, Toshiyuki ^a   Ogushi, Tetsurou ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

Actuators; Heat transport device; Micro channel; Micromachine; Thermal micro pump

Indexed keywords

ABSORPTION; ACTUATORS; ADHESIVES; BUBBLES (IN FLUIDS); COOLING; ETCHING; EVAPORATION; FLOW OF FLUIDS; HEAT TRANSFER; SCREEN PRINTING; VALVES (MECHANICAL); VAPOR PRESSURE;

HEAT TRANSPORT DEVICES; MICRO CHANNELS; MICROMACHINES; MINIATURIZATION; THERMAL MICRO PUMPS;

PUMPS;

EID: 0442311888     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.10.012     Document Type: Conference Paper

References (3)

1. Ozaki K. Pumping mechanism using periodic phase changes of a fluid. IEEE MEMS Workshop. 95:1995;31-36.
2. Jun T.K., Kim C.J. Valveless pumping using traversing vapor bubbles in microchannels. J. Appl. Phys. 83(11):1998;5658-5664.
3. Y. Yokoyama, M. Takeda, T. Umemoto, T. Ogushi, Thermal pumping system for the loop-type micro channel, in: Proceedings of the 19th Sensor Symposium 2002, IEEJ, 2002, pp. 241-244.