Design, performance and applications of SIC MEMS

Silicon Carbide Micro Electromechanical Systems for Harsh Environments

Volumn , Issue , 2006, Pages 128-180

  Zappe, Stefan ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MEMS; SILICON CARBIDE;

FURTHER DEVELOPMENT; MARKET MATURITY; MATERIAL SYSTEMS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); PERFORMANCE AND APPLICATIONS; PROCESSING TECHNOLOGIES; SILICON CARBIDES (SIC); STATE OF THE ART;

SILICON COMPOUNDS;

EID: 84967546670     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1142/9781860949098_0005     Document Type: Chapter

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