Metal-contact enhanced incorporation of deuterium in 4H- and 6H-SiC

Materials Science Forum

Volumn 338, Issue , 2000, Pages

  Linnarsson, M K ^a   Spetz, A Lloyd ^b   Janson, M S ^a   Ekedahl, L G ^b   Karlsson, S ^c   Schoner A ^c   Lundstrom I ^b   Svensson, B G ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b LINKÖPING UNIVERSITY   (Sweden)

^c ACREO AB   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; DEUTERIUM; DIFFUSION IN SOLIDS; GOLD; HEAT TREATMENT; HYDROGEN; INTERFACES (MATERIALS); NICKEL; PLATINUM; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTING SILICON COMPOUNDS; TITANIUM;

CATALYTIC METAL COATINGS;

SILICON CARBIDE;

EID: 18844482865     PISSN: 02555476     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

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