3C-SiC coating of silicon micromachined atomizers

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 165-168

  Rajan, N ^a   Zorman, C ^a   Mehregany, M ^a   DeAnna, R ^a   Harvey, R ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CHEMICAL VAPOR DEPOSITION; COATING TECHNIQUES; COATINGS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SEMICONDUCTING SILICON; SILICON CARBIDE;

SILICON MICROMACHINED ATOMIZERS;

ATOMIZERS;

EID: 0030646002     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)