Thermal chemical vapor deposition of silicon carbide films as protective coatings for microfluidic structures

Materials Research Society Symposium - Proceedings

Volumn 742, Issue , 2002, Pages 85-90

  Gallis, Spyros ^a   Futschik, Ulrike ^a   Castracane, James ^a   Kaloyeros, Alain E ^a   Efstathiadis, Harry ^a   Sherwood, Walter ^b   Hayes, Susan ^b   Fountzoulas, Costas G ^c  

^a STATE UNIVERSITY OF NEW YORK   (United States)

^b Starfire Systems Inc   (United States)

^c U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DEPOSITION; ELASTIC MODULI; FLUIDICS; HIGH TEMPERATURE EFFECTS; HYDROCARBONS; INDENTATION; PROTECTIVE COATINGS;

MICROFLUIDIC STRUCTURES;

SILICON CARBIDE;

EID: 0037955998     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-742-k2.4     Document Type: Conference Paper

References (8)

1. M. Mehregany and C. A. Zorman, Thin Solid Films, 355-356, 518, (1999).
2. A. Ned, A. Kurtz, and R. Okojie, www.nasatech.com.
3. G. Pharr and W. Oliver, Mat. Res. Soc. Bulletin, July 1992.
4. U. Futschik, H. Efstathiadis, J. Castracane and A. Kaloyeros, Mat. Res. Soc. Symp. Proc., 495 (2001).
5. www.memsnet.org
6. J. Woirgard, T. Cabioc'h, J. Riviere and J. Dargenton, Surface and Coatings Technology, 100, 128 (1998).
7. T. Scharf, H. Deng and J. Barnard, J. Vac. Sci. Technol. A, 15, 963 (1997).
8. H. Efstathiadis, Z. Yin, and F. Smith, Phys. Rev. B 46, 13119, (1997).