Silicon compatible materials for harsh environment sensors

Sensors and Actuators, A: Physical

Volumn 74, Issue 1, 1999, Pages 182-189

  Kroetz, Gerhard H ^a   Eickhoff, Martin H ^a   Moeller, Helmut ^a  

^a DAIMLER AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSENSORS; PHYSICAL PROPERTIES; SEMICONDUCTING DIAMONDS; SILICON CARBIDE; SILICON ON INSULATOR TECHNOLOGY;

HARSH ENVIRONMENT SENSOR; SILICON COMPATIBLE MATERIAL;

SEMICONDUCTING SILICON;

EID: 0032680769     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00296-9     Document Type: Article

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