Silicon carbide for RF MEMS

IEEE MTT-S International Microwave Symposium Digest

Volumn 3, Issue , 2003, Pages 1629-1632

  Melzak, Jeffrey M ^a  

^a FLX Micro   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE VELOCITY; MICROMACHINING; NATURAL FREQUENCIES; SILICON CARBIDE; THERMAL CONDUCTIVITY;

MICROFABRICATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0042592917     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)

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