High temperature sensors based on metal-insulator-silicon carbide devices

Physica Status Solidi (A) Applied Research

Volumn 162, Issue 1, 1997, Pages 493-511

  Spetz, A Lloyd ^a   Baranzahi, A ^a,b   Tobias, P ^a   Lundstrom I ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b Arbab ^*

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CAPACITANCE; CAPACITORS; CHEMICAL SENSORS; COMBUSTION; HIGH TEMPERATURE OPERATIONS; HYDROGEN; INTERDIFFUSION (SOLIDS); METAL INSULATOR BOUNDARIES; SCHOTTKY BARRIER DIODES; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR SUPERLATTICES;

METAL INSULATOR SILICON CARBIDE DEVICES;

SILICON CARBIDE;

EID: 0031192671     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-396x(199707)162:1<493::aid-pssa493>3.0.co;2-c     Document Type: Article

References (41)

1. E. M. LOGOTHETIS and W. J. KAISER, Sensors and Actuators 4, 333 (1983).
2. H. MEIXNER, J. GERBLINGER, U. LAMPE, and M. FLEISCHER, Sensors and Actuators B 23, 119 (1995).
3. M. FLEISCHER, Proc. Eurosensors X, Leuven, Belgium, Sept. 8 to 11, 1996 (pp. 25 to 33).
4. D. M. BROWN, E. DOWN, J. KRETCHMER, G. MICHON, E. SHU, and D. SCHNEIDER, Trans. 3rd Internat. High Temp. Electr. Conf., Alburquerque (NM), USA, 1996 (p. X23).
5. G. W. HUNTER, P. G. NEUDECK, L.-Y. CHEN, D. KNIGHT, C. C. LIU, and Q. H. WU, NASA Technical Memorandum 107064, 1995.
6. P. G. NEUDECK, J. Electronic Mater. 24, 283 (1995).
7. N. LUNDBERG and M. ÖSTLING, Physica, Soripta T54, 273 (1994).
8. N. LUNDBERG, M. ÖSTLING, P. TÄGSTRÖM, and U. JANSSON, J. Electrochem. Soc. 143, 1662 (1996).
9. N. A. PAPANICOLAOU, A. CHRISTOU, and L. GIPE, J. Appl. Phys. 65, 3526 (1989).
10. J. W. PALMOUR, H. S. KONG, and R. F. DAVIES, Appl. Phys. Lett. 51, 2028 (1987).
11. I. LUNDSTRÖM, M. S. SHIVARAMAN, and C. SVENSSON, J. Appl. Phys. 46, 3876 (1975).
12. A. SPETZ, F. WINQUIST, C. NYLANDER, and I. LUNDSTRÖM, Internat. Meeting Chem. Sens., Fukuoka, Japan, 1983 (pp. 479 to 487).
13. I. LUNDSTRÖM, E. HEDBORG, A. SPETZ, H. SUNDGREN, and F. WINQUIST, in: Sensors and Sensory Systems for an Electronic Nose; Vol. 212; Eds. J. W. Gardner and P. N. Bartlett, Kluwer Academic Publ., Dordrecht 1992 (p. 303).
14. A. ARBAB, A. SPETZ, Q. UL WAHAB, M. WILLANDER, and I. LUNDSTRÖM, Sensors and Mater. 4, 173 (1993).
15. A. BARANZAHI, A. LLOYD SPETZ, R. JOHANSSON, G. HAMREFORS, and I. LUNDSTRÖM. Dig. Tech. Pap. Transducers 95 and Eurosensors, Stockholm, Sweden, 1995 (p. 722).
16. A. BARANZAHI, A. LLOYD SPETZ, B. ANDERSSON, and I. LUNDSTRÖM, Sensors and Actuators B 26/27, 165 (1995).
17. M. KARLSTEEN, A. BARANZAHI, A. LLOYD SPETZ, M. WILLANDER, and I. LUNDSTRÖM, J. Electronic Mater. 24, 853 (1995).
18. P. TOBIAS. A. BARANZAHI, A. LLOYD SPETZ, O. KORDINA, E. JANZEN, and I. LUNDSTRÖM, IEEE Electronic Device Lett. 18, 287 (1997).
19. A. BARANZAHI, A. LLOYD SPETZ, M. GLAVMO, C. CARLSSON, J. NYTOMT, P. SALOMONS-SON, E. JOBSON, B. HAGGENDAL, P. MARTENSSON, and I. LUNDSTRÖM, Sensors and Actuators B, accepted.
20. A. BARANZAHI, A. LLOYD SPETZ, M. GLAVMO, J. NYTOMT, and I. LUNDSTRÖM, Dig. Tech. Pap. Transducers 95 arid Eurosensors IX, Stockholm, Sweden, June 25 to 29, 1995 (p. 741).
21. A. LLOYD SPETZ, D. SCHMEISSER, A. BARANZAHI, B. WÄLIVAARA, W. GÖPEL, and I. LUNDSTRÖM, Thin Solid Films, in press.
22. A. BARANZAHI, A. LLOYD SPETZ, and I. LUNDSTRÖM, Appl. Phys. Lett. 67, 3203 (1995).
23. I. LUNDSTRÖM, M. S. SHIVARAMAN, C. M. SVENSSON, and L. LUNDKVIST, Appl. Phys. Lett. 26, 55 (1975).
24. I. LUNDSTRÖM, M. ARMGARTH, and L.-G. PETERSSON, CRC Crit. Rev. Solid State Mater. Sci. 15, 201 (1989).
25. J. FOGELBERG, M. ERIKSSON, H. DANNETUN, and L.-G. PETERSSON, J. Appl. Phys. 8, 988 (1995).
26. H. DANNETUN, I. LUNDSTRÖM, and L.-G. PETERSSON, Surf. Sci. 173, 148 (1986).
27. Cree Research Inc., Durham, NCH 27713, USA.
28. E. JANZEN and O. KORDINA. Proc. Conf. Silicon Carbide and Related Materials, Kyoto, Japan, IOP Publishing Ltd. 1996 (p. 653).
29. A. SPETZ, U. HELMERSSON, F. ENQUIST, M. ARMGARTH, and I. LUNDSTRÖM, Thin Solid Films 177, 77 (1989).
30. V. W. DEAN, M. FRENKLACH, and J. PHILLIPS, J. Phys. Chem. 92, 5731 (1988).
31. A. BARANZAHI, High Temperature Solid State Gas Sensors Based on Silicon Carbide, Device Development and Applications, Thesis, Linköping Studies in Science and Technology, Sweden, No. 422, 1996 (p. 55).
32. S. NAKAGOMI, P. TOBIAS, A. BARANZAHI, I. LUNDSTRÖM, P. MARTENSSON, and A. LLOYD Spetz, Influence of Carbon Monoxide, Water, and Oxygen on High Temperature Catalytic Metal-Oxide-Silicon Carbide Structures, submitted to Sensors and Actuators B.
33. 2 Reactions on Pt at Atmospheric Pressur and 300 to 800 K, Measured with a Kelvin Probe, submitted to Surface Science.
34. M. RINNEMO, D. KULGINOV, S. JOHANSSON, K. L. WONG, V. P. ZHDANOV, and B. KASEMO, Surface Science 376, 297 (1997).
35. A. SPETZ, M. ARMGARTH, and I. LUNDSTRÖM, J. Appl. Phys. 64, 1274 (1988).
36. J. GERBLINGER, U. LAMPE, and H. MEIXNER, Sensors and Actuators B 24/25, 639 (1995).
37. A. CROS and K. N. TU, J. Appl. Phys. 60, 3323 (1986).
38. P. GIMMEL, B. GOMPF, D. SCHMEISSER, and W. GÖPEL, Fres. Z. Anal Chem. 333, 466 (1989).
39. L.-Y. CHEN, G. W. HUNTER, P. G. NEUDECK, G. BANSAL, J. B. PETIT, D. KNIGHT, C. C. LIU, and Q. H. WU, NASA Technical Memorandum 107255, 1996.
40. E. H. NICOLLIAN and J. R. BREWS, MOS Physics and Technology, Wiley, New York 1982.
41. L. D. THANH and P. BALK, J. Electrochem. Soc. 135, 1797 (1988).