Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications

Sensors and Actuators, A: Physical

Volumn 99, Issue 1-2, 2002, Pages 25-30

  Connolly, E J ^a,b   O'Halloran, G M ^a   Pham, H T M ^a   Sarro, P M ^a   French, P J ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b Technol and Mat Lab DIMES Delft Univ of Technology Mekelweg 4 2628 CD Delft the Netherlands ^*  (Netherlands)

Author keywords

Humidity sensor; Porous polysilicon; Porous SiC; Porous silicon

Indexed keywords

HUMIDITY SENSORS;

ATMOSPHERIC HUMIDITY; CRYSTAL MICROSTRUCTURE; ELECTRIC RESISTANCE; HEATING; POLYSILICON; POROUS MATERIALS; SILICON CARBIDE; THERMAL EFFECTS;

SILICON SENSORS;

EID: 0037197294     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00885-8     Document Type: Conference Paper

References (10)

1. An experimental and theoretical study of the formation and micro-structure of porous silicon
2. Porosity and pore size distributions of porous silicon
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4. Porous polycrystalline silicon conductivity sensor
5. Hall mobility in chemically deposited polysilicon
6. Polycrystalline silicon resistors for integrated circuits
7. The electrical properties of polycrystalline silicon films
8. Porous silicon carbide: Material properties, formation mechanism and techniques of material modification
9. Ceramic humidity sensors