Test microstructures for measurement of SiC thin film mechanical properties

Journal of Micromechanics and Microengineering

Volumn 9, Issue 2, 1999, Pages 190-193

  Serre, Christophe ^a   Pérez Rodríguez, Alejandro ^a   Romano Rodríguez, Albert ^a   Morante, Joan R ^a   Esteve, Jaume ^b   Acero, Maria Cruz ^b  

^a UNIVERSITY OF BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; FABRICATION; ION IMPLANTATION; MECHANICAL PROPERTIES; MECHANICAL VARIABLES MEASUREMENT; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; RESIDUAL STRESSES; SILICON CARBIDE; THIN FILMS;

ETCH STOP PROPERTIES; TEST MICROSTRUCTURES;

MICROELECTRONICS;

EID: 0033138326     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/9/2/321     Document Type: Article

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