SiC thin-film Fabry-Perot interferometer for fiber-optic temperature sensor

IEEE Transactions on Electron Devices

Volumn 50, Issue 10, 2003, Pages 2159-2164

  Cheng, Lin ^a   Steckl, Andrew J ^a   Scofield, James ^b  

^a University of Cincinnati   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

Fabry Perot interferometer; Fiber optic; Sapphire; SiC; Thin film

Indexed keywords

CALCULATIONS; CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH; FABRY-PEROT INTERFEROMETERS; FIBER OPTIC SENSORS; POLYCRYSTALLINE MATERIALS; SILICON CARBIDE; SINGLE CRYSTALS; SUBSTRATES; TEMPERATURE MEASUREMENT; THERMAL EFFECTS;

FIBER OPTIC TEMPERATURE SENSOR; LOW PRESSURE CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE SILICON CARBIDE; SINGLE CRYSTAL SAPPHIRE; TRIMETHYLSILANE;

THIN FILMS;

EID: 0142009492     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2003.816106     Document Type: Article

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