Micromachining techniques for advanced SiC MEMS

Materials Research Society Symposium - Proceedings

Volumn 640, Issue , 2001, Pages

  Mehregany, M ^a   Zorman, C A ^a  

^a Case Western Reserve University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MULTILAYERS; POLYCRYSTALLINE MATERIALS; POLYSILICON; REACTIVE ION ETCHING; THIN FILMS;

MICROMOLDING; MULTI USER SILICON CARBIDE;

SILICON CARBIDE;

EID: 17144468415     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)