Ion beam synthesis of polycrystalline SiC on SiO2 structures for MEMS applications

Journal of Micromechanics and Microengineering

Volumn 10, Issue 2, 2000, Pages 152-156

  Serre, Christophe ^a   Pérez Rodríguez, Alejandro ^a   Morante, Joan Ramón ^a   Esteve, Jaume ^b   Acero, María Cruz ^b   Kögler, Reinhard ^c   Skorupa, Wolfgang ^c  

^a UNIVERSITY OF BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^c INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; COMPUTER SIMULATION; CRYSTAL STRUCTURE; ION IMPLANTATION; POLYCRYSTALLINE MATERIALS; SILICA; SILICON CARBIDE; SILICON ON INSULATOR TECHNOLOGY; STOICHIOMETRY; SYNTHESIS (CHEMICAL); THERMAL INSULATING MATERIALS; X RAY DIFFRACTION ANALYSIS;

HIGH DOSE CARBON ION IMPLANTATION; ION BEAM SYNTHESIS; MICROMECHANICAL TEST STRUCTURES;

MICROELECTROMECHANICAL DEVICES;

EID: 0342520576     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/10/2/309     Document Type: Article

References (10)

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