Measurement of the thermal conductivity of thin β-SiC films between 80 K and 600 K

Materials Science Forum

Volumn 264-268, Issue PART 1, 1998, Pages 631-634

  Jansen, E ^a   Ziermann, R ^a   Obermeier, E ^a   Krotz G ^b   Wagner, Ch ^b  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^b Daimler Benz AG Forschung und Technik München   (Germany)

Author keywords

Micromechanics; Thermal Conductivity

Indexed keywords

HEAT FLUX; PHONONS; SEMICONDUCTING SILICON COMPOUNDS; SILICON CARBIDE; THERMAL CONDUCTIVITY OF SOLIDS; THERMAL EFFECTS; THERMAL VARIABLES MEASUREMENT; THIN FILMS;

MICROMECHANICAL TEST STRUCTURE; STEADY STATE TECHNIQUE;

SEMICONDUCTING FILMS;

EID: 3743110460     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.264-268.631     Document Type: Article

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