SCOPUS 정보 검색 플랫폼

International Materials Reviews

Volumn 45, Issue 3, 2000, Pages 85-108

Silicon carbide for microelectromechanical systems

(6) Mehregany, M a Zorman, C A a Roy, S b Fleischman, A J b Wu, C H c Rajan, N a

a Case Western Reserve University (United States)

b LERNER RESEARCH INSTITUTE (United States)

c NONE

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; DRY ETCHING; EVAPORATION; INTEGRATED CIRCUIT MANUFACTURE; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; REACTIVE ION ETCHING; SENSORS; SPUTTERING; THIN FILMS;

MICROELECTROMECHANICAL SYSTEMS; MICROMOULDING; WAFER BONDING;

SILICON CARBIDE;

EID: 0034429272 PISSN: 09506608 EISSN: None Source Type: Journal
DOI: 10.1179/095066000101528322 Document Type: Article

Times cited : (144)

References (143)

1
- 0020127035
- K. E. PETERSEN: Proc. IEEE, 1982, 70, 420-457.
- (1982) Proc. IEEE , vol.70 , pp. 420-457
- Petersen, K.E.¹

2
- 0343588515
- Montreal, Que., Canada, May The Electrochemical Society
- J. BHARDWAJ, H. ASHRAF, and A. McQUARRIE: Proc. Symp. 'Microstructure and microfabricated systems', Montreal, Que., Canada, May 1997, The Electrochemical Society.
- (1997) Proc. Symp. 'Microstructure and Microfabricated Systems'
- Bhardwaj, J.¹ Ashraf, H.² McQuarrie, A.³

3
- 0004181625
- Boca Raton, FL, CRC Press
- M. MADOU: 'Fundamentals of microfabrication', 275-323; 1997, Boca Raton, FL, CRC Press.
- (1997) Fundamentals of Microfabrication , pp. 275-323
- Madou, M.¹

4
- 0025387629
- G. R. FISHER and P. BARNES: Philos. Mag. B, 1990, 61, 217-236.
- (1990) Philos. Mag. B , vol.61 , pp. 217-236
- Fisher, G.R.¹ Barnes, P.²

5
- 0001122940
- S. NISHINO, H. MATSUNAMI, and T. TANAKA: J. Cryst. Growth., 1978, 45, 144-149.
- (1978) J. Cryst. Growth. , vol.45 , pp. 144-149
- Nishino, S.¹ Matsunami, H.² Tanaka, T.³

6
- 0039602779
- S. YOSHIDA, E. SAKUMA, H. OKUMURA, S. MISAWA, and K. ENDO: J. Appl. Phys., 1987, 62, 303-305.
- (1987) J. Appl. Phys. , vol.62 , pp. 303-305
- Yoshida, S.¹ Sakuma, E.² Okumura, H.³ Misawa, S.⁴ Endo, K.⁵

7
- 0343152982
- E. G. ACHESON: J. Franklin Inst., 1893, 278-289.
- (1893) J. Franklin Inst. , pp. 278-289
- Acheson, E.G.¹

8
- 0004169367
- New York, McGraw Hill
- G. T. A. KOVACS: 'Micromachined transducers sourcebook', 26; 1998, New York, McGraw Hill.
- (1998) Micromachined Transducers Sourcebook , pp. 26
- Kovacs, G.T.A.¹

9
- 84914717195
- C. E. WOODELL: Trans. Electrochem. Soc., 1936, 68, 111-130.
- (1936) Trans. Electrochem. Soc. , vol.68 , pp. 111-130
- Woodell, C.E.¹

10
- 0021513105
- C. D. FUNG and J. J. KOPANSKY: Appl. Phys. Lett., 1984, 45, 757-759.
- (1984) Appl. Phys. Lett. , vol.45 , pp. 757-759
- Fung, C.D.¹ Kopansky, J.J.²

11
- 0021482135
- W. J. LU, A. J. STECKL, T. P. CHOW, and W. KATZ: J. Electrochem. Soc., 1984, 131, 1907-1914.
- (1984) J. Electrochem. Soc. , vol.131 , pp. 1907-1914
- Lu, W.J.¹ Steckl, A.J.² Chow, T.P.³ Katz, W.⁴

12
- 0030565227
- F. OWMAN, C. HALLIN, P. MARTENSSON, and E. JANZEN: J. Cryst. Growth, 1996, 167, 391-395.
- (1996) J. Cryst. Growth , vol.167 , pp. 391-395
- Owman, F.¹ Hallin, C.² Martensson, P.³ Janzen, E.⁴

13
- 0003597031
- London, Inspec.
- G. L. HARRIS: 'Properties of silicon carbide'; 1995, London, Inspec.
- (1995) Properties of Silicon Carbide
- Harris, G.L.¹

14
- 0026890805
- P. A. IVANOV and V. E. CHELNOKOV: Semicond. Sci. Technol., 1992, 7, 863-880.
- (1992) Semicond. Sci. Technol. , vol.7 , pp. 863-880
- Ivanov, P.A.¹ Chelnokov, V.E.²

15
- 21544461610
- H. MORKOC, S. STRITE, G. B. GAO, M. E. LIN, B. SVERDLOV, and M. BURNS: J. Appl. Phys., 1994, 76, 1363-1397.
- (1994) J. Appl. Phys. , vol.76 , pp. 1363-1397
- Morkoc, H.¹ Strite, S.² Gao, G.B.³ Lin, M.E.⁴ Sverdlov, B.⁵ Burns, M.⁶

16
- 0029406301
- L. M. PORTER and R. F. DAVIS: Mater. Sci. Eng., 1995, B34, 83-105.
- (1995) Mater. Sci. Eng. , vol.B34 , pp. 83-105
- Porter, L.M.¹ Davis, R.F.²

17
- 0030268828
- J. B. CASADY and R. W. JOHNSON: Solid State Electron., 1996, 39, 1409-1422.
- (1996) Solid State Electron. , vol.39 , pp. 1409-1422
- Casady, J.B.¹ Johnson, R.W.²

18
- 85001714913
- M. A. CAPANO and R. J. TREW (ed.): Mater. Res. Soc. Bull., 1997, 22, 19-56.
- (1997) Mater. Res. Soc. Bull. , vol.22 , pp. 19-56
- Capano, M.A.¹ Trew, R.J.²

19
- 36449005151
- L. G. MATUS, J. A. POWELL, and C. S. SALUPO: Appl. Phys. Lett., 1991, 59, 1770-1772.
- (1991) Appl. Phys. Lett. , vol.59 , pp. 1770-1772
- Matus, L.G.¹ Powell, J.A.² Salupo, C.S.³

20
- 0028427759
- P. G. NEUDECK, D. J. LARKIN, J. E. STARR. J. A. POWELL, C. S. SALUPO, and L. G. MATUS: IEEE Trans. Electron Devices, 1994, 41, 826-835.
- (1994) IEEE Trans. Electron Devices , vol.41 , pp. 826-835
- Neudeck, P.G.¹ Larkin, D.J.² Starr, J.E.³ Powell, J.A.⁴ Salupo, C.S.⁵ Matus, L.G.⁶

21
- 0026940017
- M. BHATNAGER, P. K. McLARTY, and B. J. BALIGA: IEEE Electron Devices Lett., 1992, 13, 501-503.
- (1992) IEEE Electron Devices Lett. , vol.13 , pp. 501-503
- Bhatnager, M.¹ McLarty, P.K.² Baliga, B.J.³

22
- 0000552506
- C. E. WEITZEL and K. E. MOORE: J. Electron. Mater., 1998, 27, 365-369.
- (1998) J. Electron. Mater. , vol.27 , pp. 365-369
- Weitzel, C.E.¹ Moore, K.E.²

23
- 0027576098
- J. W. PALMOUR, J. A. EDMOND, H. S. KONG, and C. H. CARTER: Physica B, 1993, 185, 461-465.
- (1993) Physica B , vol.185 , pp. 461-465
- Palmour, J.W.¹ Edmond, J.A.² Kong, H.S.³ Carter, C.H.⁴

24
- 33847510976
- Y. M. TAIROV and V. F. TSVETKOV: J. Cryst. Growth, 1978, 43, 209-212.
- (1978) J. Cryst. Growth , vol.43 , pp. 209-212
- Tairov, Y.M.¹ Tsvetkov, V.F.²

25
- 0020112685
- G. ZIEGLER, P. LANIG, D. THEIS, and C. WEYRICH: IEEE Trans. Electron Devices, 1983, ED-30, 277-281.
- (1983) IEEE Trans. Electron Devices , vol.ED-30 , pp. 277-281
- Ziegler, G.¹ Lanig, P.² Theis, D.³ Weyrich, C.⁴

26
- 0031648394
- H. N. JAYATIRTHA and M. G. SPENCER: Mater. Sci. Forum, 1998, 264-268, 77-80.
- (1998) Mater. Sci. Forum , vol.264-268 , pp. 77-80
- Jayatirtha, H.N.¹ Spencer, M.G.²

27
- 3743130700
- V. TSVETKOV, R. GLASS, D. HENSHALL, D. ASBURY, and C. H. CARTER: Mater. Sci. Forum, 1998, 264-268, 3-8.
- (1998) Mater. Sci. Forum , vol.264-268 , pp. 3-8
- Tsvetkov, V.¹ Glass, R.² Henshall, D.³ Asbury, D.⁴ Carter, C.H.⁵

28
- 0031150834
- J. A. TOMANOVICH: Solid State Technol., 1997, 40, 135-141.
- (1997) Solid State Technol. , vol.40 , pp. 135-141
- Tomanovich, J.A.¹

29
- 0029238321
- J. S. GOELA, M. A. PICKERING, and R. L. TAYLOR: Mater. Res. Symp. Proc., 1995, 362, 71-87.
- (1995) Mater. Res. Symp. Proc. , vol.362 , pp. 71-87
- Goela, J.S.¹ Pickering, M.A.² Taylor, R.L.³

30
- 0012602950
- Amorphous and crystalline silicon carbide and related materials II
- Berlin, Springer
- Y. CHINONE, S. EZAKI, F. FUJITA, and K. MATSUMOTO: 'Amorphous and crystalline silicon carbide and related materials II', Proceedings in Physics, Vol. 43, 198-206; 1989, Berlin, Springer.
- (1989) Proceedings in Physics , vol.43 , pp. 198-206
- Chinone, Y.¹ Ezaki, S.² Fujita, F.³ Matsumoto, K.⁴

31
- 0001072754
- J. A. POWELL, D. J. LARKIN, L. G. MATUS, W. J. CTIOYKE, J. L. BRADSHAW, L. HENDERSON, M. YOGANATHAN, J. YANG, and P. PIROUZ: Appl. Phys. Lett., 1990, 56, 1442-1444.
- (1990) Appl. Phys. Lett. , vol.56 , pp. 1442-1444
- Powell, J.A.¹ Larkin, D.J.² Matus, L.G.³ Ctioyke, W.J.⁴ Bradshaw, J.L.⁵ Henderson, L.⁶ Yoganathan, M.⁷ Yang, J.⁸ Pirouz, P.⁹

32
- 36448999073
- O. KORDINA, A. HENRY, J. P. BERGMAN, N. T. SON, W. M. CHEN, C. HALLIN, and E. JANZEN: Appl. Phys. Lett., 1995, 66, 1373-1375.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 1373-1375
- Kordina, O.¹ Henry, A.² Bergman, J.P.³ Son, N.T.⁴ Chen, W.M.⁵ Hallin, C.⁶ Janzen, E.⁷

33
- 33747502586
- S. NISHINO, J. A. POWELL, and H. WILL: Appl. Phys. Lett., 1983, 42, 460-462.
- (1983) Appl. Phys. Lett. , vol.42 , pp. 460-462
- Nishino, S.¹ Powell, J.A.² Will, H.³

34
- 36549099703
- J. A. POWELL, D. J. LARKIN, L. G. MATUS, W. J. CHOYKE, J. L. BRADSHAW, L. HENDERSON, M. YOGANATHAN, J. YANG, and P. PIROUZ: Appl. Phys. Lett., 1990, 56, 1353-1355.
- (1990) Appl. Phys. Lett. , vol.56 , pp. 1353-1355
- Powell, J.A.¹ Larkin, D.J.² Matus, L.G.³ Choyke, W.J.⁴ Bradshaw, J.L.⁵ Henderson, L.⁶ Yoganathan, M.⁷ Yang, J.⁸ Pirouz, P.⁹

35
- 0031271914
- D. HEIMANN, T. WAGNER, J. BILL, F. ALDINGER, and F. F. LANGE: J. Mater. Res., 1997, 12, 3099-3101.
- (1997) J. Mater. Res. , vol.12 , pp. 3099-3101
- Heimann, D.¹ Wagner, T.² Bill, J.³ Aldinger, F.⁴ Lange, F.F.⁵

36
- 0029232973
- R. RUPP, P. LANIG, J. VOELKL, and D. STEPHANI: J. Cryst. Growth, 1995, 146, 37-41.
- (1995) J. Cryst. Growth , vol.146 , pp. 37-41
- Rupp, R.¹ Lanig, P.² Voelkl, J.³ Stephani, D.⁴

37
- 0342718403
- Amorphous and crystalline silicon carbide III
- Berlin, Springer
- K. G. IRVINE, M. G. SPENCER, and M. ALUKO: 'Amorphous and crystalline silicon carbide III', Proceedings in Physics, Vol. 56, 291-294; 1992, Berlin, Springer.
- (1992) Proceedings in Physics , vol.56 , pp. 291-294
- Irvine, K.G.¹ Spencer, M.G.² Aluko, M.³

38
- 0342605356
- O. KORDINA, A. HENRY, E. JANZEN, and C. H. CARTER: Mater. Sci. Forum, 1998, 264-268, 97-102.
- (1998) Mater. Sci. Forum , vol.264-268 , pp. 97-102
- Kordina, O.¹ Henry, A.² Janzen, E.³ Carter, C.H.⁴

39
- 51249162043
- T. KIMOTO, A. ITOH, H. MATSUNAMl, T. NAKATA, and M. WATANABE: J. Electron. Mater., 1995, 24, 235-240.
- (1995) J. Electron. Mater. , vol.24 , pp. 235-240
- Kimoto, T.¹ Itoh, A.² Matsunaml, H.³ Nakata, T.⁴ Watanabe, M.⁵

40
- 0000015878
- Amorphous and crystalline silicon carbide IV
- Berlin, Springer
- W. SUTTROP, H. ZHANG, M. SCHADT, G. PENSL, K. DOHNKE, and S. LEIBENZEDER: 'Amorphous and crystalline silicon carbide IV', Proceedings in Physics, Vol. 71, 143-148; 1992, Berlin, Springer.
- (1992) Proceedings in Physics , vol.71 , pp. 143-148
- Suttrop, W.¹ Zhang, H.² Schadt, M.³ Pensl, G.⁴ Dohnke, K.⁵ Leibenzeder, S.⁶

41
- 0028712670
- Y. HIRANO and T. INADA: J. Electrochem. Soc., 1994, 141, 3489-3494.
- (1994) J. Electrochem. Soc. , vol.141 , pp. 3489-3494
- Hirano, Y.¹ Inada, T.²

42
- 14344277817
- M. RAO, P. GRIFFITHS, O. W. HOLLAND, G. KELNER, J. A. FREITAS, D. S. SIMONS, P. H. CHI, and M. GHEZZO: J. Appl. Phys., 1995, 77, 2479-2485.
- (1995) J. Appl. Phys. , vol.77 , pp. 2479-2485
- Rao, M.¹ Griffiths, P.² Holland, O.W.³ Kelner, G.⁴ Freitas, J.A.⁵ Simons, D.S.⁶ Chi, P.H.⁷ Ghezzo, M.⁸

43
- 2342567120
- N. C. TOMBS, J. J. COMER, and J. F. FITZGERALD: Solid State Electron., 1965, 8, 839.
- (1965) Solid State Electron. , vol.8 , pp. 839
- Tombs, N.C.¹ Comer, J.J.² Fitzgerald, J.F.³

44
- 0023365266
- J. A. POWELL, L. G. MATUS, and M. A. KUCZMARSKI: J. Electrochem. Soc., 1987, 134, 1558-1565.
- (1987) J. Electrochem. Soc. , vol.134 , pp. 1558-1565
- Powell, J.A.¹ Matus, L.G.² Kuczmarski, M.A.³

45
- 0342718405
- Amorphous and crystalline silicon carbide and related materials II
- Berlin, Springer
- S. NISHINO and J. SARAIE: 'Amorphous and crystalline silicon carbide and related materials II', Proceedings in Physics, Vol. 43, 8-13; 1989, Berlin, Springer.
- (1989) Proceedings in Physics , vol.43 , pp. 8-13
- Nishino, S.¹ Saraie, J.²

46
- 0021587519
- H. P. LIAW and R. F. DAVIS: J. Electrochem. Soc., 1984, 131, 3014-3018.
- (1984) J. Electrochem. Soc. , vol.131 , pp. 3014-3018
- Liaw, H.P.¹ Davis, R.F.²

47
- 0032120813
- Y. GAO, J. H. EDGAR, J. CHAUDHURI, S. N. CHEEMA, M. V. SIDOROV, and D. N. BRASKI: J. Cryst. Growth, 1998, 191, 439-445.
- (1998) J. Cryst. Growth , vol.191 , pp. 439-445
- Gao, Y.¹ Edgar, J.H.² Chaudhuri, J.³ Cheema, S.N.⁴ Sidorov, M.V.⁵ Braski, D.N.⁶

48
- 0038827511
- Y. OHOSHITA and A. ISHITANI: J. Appl. Phys., 1989, 66, 4535-4537.
- (1989) J. Appl. Phys. , vol.66 , pp. 4535-4537
- Ohoshita, Y.¹ Ishitani, A.²

49
- 0026753532
- A. J. STECKL and J. P. LI: IEEE Trans. Electron Devices, 1992, 39, 64-74.
- (1992) IEEE Trans. Electron Devices , vol.39 , pp. 64-74
- Steckl, A.J.¹ Li, J.P.²

50
- 0007030090
- K. A. JACOBSON: J. Electrochem. Soc., 1971, 118, 1001-1006.
- (1971) J. Electrochem. Soc. , vol.118 , pp. 1001-1006
- Jacobson, K.A.¹

51
- 0030085243
- C. H. WU, C. JACOB, X. J. NING, S. NISHINO, and P. PIROUZ: J. Cryst. Growth, 1996, 158, 480-490.
- (1996) J. Cryst. Growth , vol.158 , pp. 480-490
- Wu, C.H.¹ Jacob, C.² Ning, X.J.³ Nishino, S.⁴ Pirouz, P.⁵

52
- 0001725919
- P. PIROUZ, C. M. CHOREY, T. T. CHENG, and J. A. POWELL: Mater. Res. Soc. Symp. Proc., 1987, 91, 399-404.
- (1987) Mater. Res. Soc. Symp. Proc. , vol.91 , pp. 399-404
- Pirouz, P.¹ Chorey, C.M.² Cheng, T.T.³ Powell, J.A.⁴

53
- 0038834295
- P. PIROUZ: Polycryst. Semicond., 1989, 35, 200-212.
- (1989) Polycryst. Semicond. , vol.35 , pp. 200-212
- Pirouz, P.¹

54
- 0342718404
- K. SHIBAHARA, S. NISHINO, and H. MATSUNAMI: Mater. Res. Soc. Symp. Proc., 1987, 97, 183-188.
- (1987) Mater. Res. Soc. Symp. Proc. , vol.97 , pp. 183-188
- Shibahara, K.¹ Nishino, S.² Matsunami, H.³

55
- 0003592795
- J. D. PARSONS: Mater. Res. Soc. Symp. Proc., 1987, 97, 271-281.
- (1987) Mater. Res. Soc. Symp. Proc. , vol.97 , pp. 271-281
- Parsons, J.D.¹

56
- 0027642149
- N. BECOURT, B. CROS, J. L. PONTHENIER, R. BERJOAN, A. M. PAPON, and C. JAUSSAUD: Appl. Surf. Sci., 1993, 68, 461-466.
- (1993) Appl. Surf. Sci. , vol.68 , pp. 461-466
- Becourt, N.¹ Cros, B.² Ponthenier, J.L.³ Berjoan, R.⁴ Papon, A.M.⁵ Jaussaud, C.⁶

57
- 0029255289
- J. P. LI and A. J. STECKL: J. Electrochem. Soc., 1995, 142, 634-641.
- (1995) J. Electrochem. Soc. , vol.142 , pp. 634-641
- Li, J.P.¹ Steckl, A.J.²

58
- 0042728311
- R. SCHOLZ, U. GOSELE, E. NIEMANN, D. LEIDICH, and F. WISCHMEYER: Diam. Relat. Mater., 1997, 6, 1365-1368.
- (1997) Diam. Relat. Mater. , vol.6 , pp. 1365-1368
- Scholz, R.¹ Gosele, U.² Niemann, E.³ Leidich, D.⁴ Wischmeyer, F.⁵

59
- 0029207973
- V. CIMALLA, K. V. KARAGODINA, J. PEZOLDT, and G. EICHHORN: Mater. Sci. Eng., 1995, B29, 170-175.
- (1995) Mater. Sci. Eng. , vol.B29 , pp. 170-175
- Cimalla, V.¹ Karagodina, K.V.² Pezoldt, J.³ Eichhorn, G.⁴

60
- 0031699631
- Y. H. SEO, K. C. KIM, H. W. SHIM, K. S. NAHM, E. K. SUH, H. J. LEE, D. K. KIM, and B. T. LEE: J. Electrochem. Soc., 1998, 145, 292-299.
- (1998) J. Electrochem. Soc. , vol.145 , pp. 292-299
- Seo, Y.H.¹ Kim, K.C.² Shim, H.W.³ Nahm, K.S.⁴ Suh, E.K.⁵ Lee, H.J.⁶ Kim, D.K.⁷ Lee, B.T.⁸

61
- 36449003431
- C. A. ZORMAN, A. J. FLEISCHMAN, A. S. DEWA, M. MEHREGANY, C. JACOB, S. NISHINO, and P. PIROUZ: J. Appl. Phys., 1995, 78, 5136.
- (1995) J. Appl. Phys. , vol.78 , pp. 5136
- Zorman, C.A.¹ Fleischman, A.J.² Dewa, A.S.³ Mehregany, M.⁴ Jacob, C.⁵ Nishino, S.⁶ Pirouz, P.⁷

62
- 0031673032
- R. SCHOLZ, U. GOSELE, F. WISCHMEYER, and K. NIEMANN: Mater. Sci. Forum, 1998, 264-268, 219-222.
- (1998) Mater. Sci. Forum , vol.264-268 , pp. 219-222
- Scholz, R.¹ Gosele, U.² Wischmeyer, F.³ Niemann, K.⁴

63
- 0042938681
- T. ESHITA, T. SUZUKI, T. HARA, F. MIENO, Y. FURUMURA, M. MAEDA, T. SUGII, and T. ITO: Mater. Res. Soc. Symp. Proc., 1988, 116, 357-362.
- (1988) Mater. Res. Soc. Symp. Proc. , vol.116 , pp. 357-362
- Eshita, T.¹ Suzuki, T.² Hara, T.³ Mieno, F.⁴ Furumura, Y.⁵ Maeda, M.⁶ Sugii, T.⁷ Ito, T.⁸

64
- 0342283419
- Amorphous and crystalline silicon carbide and related materials II
- Berlin, Springer
- J. C. LIAO, J. L. CROWLEY, and P. H. KLEIN: 'Amorphous and crystalline silicon carbide and related materials II', Proceedings in Physics, Vol. 43, 21-25; 1989, Berlin, Springer.
- (1989) Proceedings in Physics , vol.43 , pp. 21-25
- Liao, J.C.¹ Crowley, J.L.² Klein, P.H.³

65
- 0026414811
- Y. HATTORl, T. SUZUKI, T. MURATA, T. YABUMI, K. YASUDA, and M. SAJI: J. Cryst. Growth, 1991, 115, 607-611.
- (1991) J. Cryst. Growth , vol.115 , pp. 607-611
- Hattorl, Y.¹ Suzuki, T.² Murata, T.³ Yabumi, T.⁴ Yasuda, K.⁵ Saji, M.⁶

66
- 0001301170
- H. NAGASAWA and Y. YAMAGUCHI: Thin Solid Films, 1993, 225, 230-234.
- (1993) Thin Solid Films , vol.225 , pp. 230-234
- Nagasawa, H.¹ Yamaguchi, Y.²

67
- 0029274717
- J. D. HWANG, Y. K. FANG, Y. J. SONG, and D. N. YUANG: J. Appl. Phys., 1995, 34, 1447-1450.
- (1995) J. Appl. Phys. , vol.34 , pp. 1447-1450
- Hwang, J.D.¹ Fang, Y.K.² Song, Y.J.³ Yuang, D.N.⁴

68
- 0029754719
- J. D. HWANG, Y. K. FANG, Y. J. SONG, and D. N. YUANG: Thin Solid Films, 1996, 272, 4-6.
- (1996) Thin Solid Films , vol.272 , pp. 4-6
- Hwang, J.D.¹ Fang, Y.K.² Song, Y.J.³ Yuang, D.N.⁴

69
- 0343152976
- A. J. STECKL. and J. P. LI: Appl. Phys. Lett., 1992, 60, 1-3.
- (1992) Appl. Phys. Lett. , vol.60 , pp. 1-3
- Steckl, A.J.¹ Li, J.P.²

70
- 36449007795
- A. J. STECKL, C. YUAN, J. P. LI, and M. J. LOBODA: Appl. Phys. Lett., 1993, 63, 3347-3349.
- (1993) Appl. Phys. Lett. , vol.63 , pp. 3347-3349
- Steckl, A.J.¹ Yuan, C.² Li, J.P.³ Loboda, M.J.⁴

71
- 0033098324
- S. MADAPURA, A. J. STECKL, and M. LOBODA: J. Electrochem. Soc., 1999, 146, 1197-1202.
- (1999) J. Electrochem. Soc. , vol.146 , pp. 1197-1202
- Madapura, S.¹ Steckl, A.J.² Loboda, M.³

72
- 0006735339
- C. YUAN, A. J. STECKL, and M. J. LOBODA: Appl. Phys. Lett., 1994, 64, 3000-3002.
- (1994) Appl. Phys. Lett. , vol.64 , pp. 3000-3002
- Yuan, C.¹ Steckl, A.J.² Loboda, M.J.³

73
- 0012165411
- Q. WAHAB, L. HULTMAN, I. P. IVANOV, M. WILLANDER, and J. E. SUNDGREN: J. Mater. Res., 1995, 10, 1349-1351.
- (1995) J. Mater. Res. , vol.10 , pp. 1349-1351
- Wahab, Q.¹ Hultman, L.² Ivanov, I.P.³ Willander, M.⁴ Sundgren, J.E.⁵

74
- 0031673034
- J. SCHMITT, T. TROFFER, K. CHRISTIANSEN, S. CHRISTIANSEN, R. HELBIG, G. PENSL, and H. P. STRUNK: Mater. Sci. Forum, 1998, 264-268, 247-250.
- (1998) Mater. Sci. Forum , vol.264-268 , pp. 247-250
- Schmitt, J.¹ Troffer, T.² Christiansen, K.³ Christiansen, S.⁴ Helbig, R.⁵ Pensl, G.⁶ Strunk, H.P.⁷

75
- 0031701628
- T. HATAYAMA, T. FUYUKI, and H. MATSUNAMI: Mater. Sci. Forum, 1998, 264-268, 235-238.
- (1998) Mater. Sci. Forum , vol.264-268 , pp. 235-238
- Hatayama, T.¹ Fuyuki, T.² Matsunami, H.³

76
- 3743067108
- J. CHEN, A. J. STECKL, and M. J. LOBODA: Mater. Sci. Forum, 1998, 264-268, 239-242.
- (1998) Mater. Sci. Forum , vol.264-268 , pp. 239-242
- Chen, J.¹ Steckl, A.J.² Loboda, M.J.³

77
- 0031698842
- M. UCHIDA, M. DEGUCHI, K. TAKAHASHI, M. KITABATAKE, and M. KITAGAWA: Mater. Sci. Forum, 1998, 264-268, 243-246.
- (1998) Mater. Sci. Forum , vol.264-268 , pp. 243-246
- Uchida, M.¹ Deguchi, M.² Takahashi, K.³ Kitabatake, M.⁴ Kitagawa, M.⁵

78
- 0031674121
- J. PEZOLDT, T. STAUDEN, V. CIMALLA, G. ECKE, H. ROMANUS, and G. EICHHORN: Mater. Sci. Forum, 1998, 264-268, 251-254.
- (1998) Mater. Sci. Forum , vol.264-268 , pp. 251-254
- Pezoldt, J.¹ Stauden, T.² Cimalla, V.³ Ecke, G.⁴ Romanus, H.⁵ Eichhorn, G.⁶

79
- 0031649871
- A. FISSEL, K. PFENNIGHAUS, U. KAISER, J. KRAUSSLICII, H. HOBERT, B. SCHROTER, and W. RICHTER: Mater. Sci. Forum, 1998, 264-268, 255-258.
- (1998) Mater. Sci. Forum , vol.264-268 , pp. 255-258
- Fissel, A.¹ Pfennighaus, K.² Kaiser, U.³ Krausslicii, J.⁴ Hobert, H.⁵ Schroter, B.⁶ Richter, W.⁷

80
- 0018961522
- T. TOHDA, K. WASA, and S. HAYAKAWA: J. Electrochem. Soc., 1980, 127, 44-47.
- (1980) J. Electrochem. Soc. , vol.127 , pp. 44-47
- Tohda, T.¹ Wasa, K.² Hayakawa, S.³

81
- 0018808545
- Y. HIROHATA, M. KOBAYASHI, S. MAEDA, K. NAKAMURA, M. MOHRI, K. WATANABE, and T. YAMASHINA: Thin Solid Films, 1979, 63, 237-242.
- (1979) Thin Solid Films , vol.63 , pp. 237-242
- Hirohata, Y.¹ Kobayashi, M.² Maeda, S.³ Nakamura, K.⁴ Mohri, M.⁵ Watanabe, K.⁶ Yamashina, T.⁷

82
- 0016920931
- K. WASA, T. NAGAI, and S. HAYAKAWA: Thin Solid Films, 1976, 31, 235-241.
- (1976) Thin Solid Films , vol.31 , pp. 235-241
- Wasa, K.¹ Nagai, T.² Hayakawa, S.³

83
- 0037524220
- Y. SUN and T. MIYASATO: J. Appl. Phys., 1998, 84, 2602-2611.
- (1998) J. Appl. Phys. , vol.84 , pp. 2602-2611
- Sun, Y.¹ Miyasato, T.²

84
- 0031234013
- Y. SUN, T. MIYASATO, J. K. WIGMORE, N. SONODA, and Y. WATARI: J. Appl. Phys., 1997, 82, 2334-2341.
- (1997) J. Appl. Phys. , vol.82 , pp. 2334-2341
- Sun, Y.¹ Miyasato, T.² Wigmore, J.K.³ Sonoda, N.⁴ Watari, Y.⁵

85
- 0343588513
- S. YONEKUBO, K. KAMIMURA, and Y. ONUMA: Inst. Phys. Conf. Ser., 1996. (142), 233-236.
- (1996) Inst. Phys. Conf. Ser. , Issue.142 , pp. 233-236
- Yonekubo, S.¹ Kamimura, K.² Onuma, Y.³

86
- 0028413070
- G. KROTZ, G. MULLER, G. DERST, Ch. WIBERTZ, and S. KALBEITZER: Diam. Relat. Mater., 1994, 3, 917-921.
- (1994) Diam. Relat. Mater. , vol.3 , pp. 917-921
- Krotz, G.¹ Muller, G.² Derst, G.³ Wibertz, Ch.⁴ Kalbeitzer, S.⁵

87
- 0026415468
- B. RUTTENSPERGER, G. KROTZ, G. MULLER, G. DERST, and S. KALBITZER: J. Non-Cryst. Solids, 1991, 137/138, 635-638.
- (1991) J. Non-Cryst. Solids , vol.137-138 , pp. 635-638
- Ruttensperger, B.¹ Krotz, G.² Muller, G.³ Derst, G.⁴ Kalbitzer, S.⁵

88
- 0028406635
- A. KLUMPP, U. SCHABER, H. L. OFFEREINS, K. KUHL, and H. SANMAIER: Sens. Actuators A, 1994, 41-42, 310-316.
- (1994) Sens. Actuators A , vol.41-42 , pp. 310-316
- Klumpp, A.¹ Schaber, U.² Offereins, H.L.³ Kuhl, K.⁴ Sanmaier, H.⁵

89
- 0042284297
- P. M. SARRO, C. R. DeBOER, E. KORKMAZ, and J. M. W. LAROS: Sens. Actuators A, 1998, 67, 175-180.
- (1998) Sens. Actuators A , vol.67 , pp. 175-180
- Sarro, P.M.¹ DeBoer, C.R.² Korkmaz, E.³ Laros, J.M.W.⁴

90
- 2842568153
- J. RODRIGUEZ-VIEJO, N. CLAVAGUERA, Z. EL FELK, M. T. CLAVAGUERA-MORA, G. ARNAUD, J. CAMASSEL, J. PASCUAL, S. BERBKRICH, and J. MILLAN: Mater. Sci. Technol., 1996, 12, 98-101.
- (1996) Mater. Sci. Technol. , vol.12 , pp. 98-101
- Rodriguez-Viejo, J.¹ Clavaguera, N.² Felk, Z.E.L.³ Clavaguera-Mora, M.T.⁴ Arnaud, G.⁵ Camassel, J.⁶ Pascual, J.⁷ Berbkrich, S.⁸ Millan, J.⁹

91
- 0012983099
- M. T. CLAVAGUKRA-MORA, J. RODRIGUEZ-VIEJO, Z. EL FELK, E. HURTOS, S. BERBERICH, J. STOEMENOS, and N. CLAVAGUERA: Diam. Relat. Mater., 1997, 6, 1306-1310.
- (1997) Diam. Relat. Mater. , vol.6 , pp. 1306-1310
- Clavagukra-Mora, M.T.¹ Rodriguez-Viejo, J.² Felk, Z.E.L.³ Hurtos, E.⁴ Berberich, S.⁵ Stoemenos, J.⁶ Clavaguera, N.⁷

92
- 0031699017
- A. J. FLEISCHMAN, X. WEI, C. A. ZORMAN, and M. MEHREGANY: Mater. Sci. Forum, 1998, 264-268, 885-888.
- (1998) Mater. Sci. Forum , vol.264-268 , pp. 885-888
- Fleischman, A.J.¹ Wei, X.² Zorman, C.A.³ Mehregany, M.⁴

93
- 0032001410
- C. A. ZORMAN, S. ROY, C-H. WU, A. J. FLEISCHMAN, and M. MEHREGANY: J. Mater. Res., 1998, 13, 406-412.
- (1998) J. Mater. Res. , vol.13 , pp. 406-412
- Zorman, C.A.¹ Roy, S.² Wu, C.-H.³ Fleischman, A.J.⁴ Mehregany, M.⁵

94
- 0042891503
- V. J. JENNINGS: Mater. Res. Bull., 1969, 4, 199-210.
- (1969) Mater. Res. Bull. , vol.4 , pp. 199-210
- Jennings, V.J.¹

95
- 0343229447
- Amorphous and crystalline silicon carbide and related materials II
- Berlin, Springer
- P. E. R. NORDQUIST, Jr, H. LESSOFF, R. J. GORMAN, and M. L. GIPE: 'Amorphous and crystalline silicon carbide and related materials II', Proceedings in Physics, Vol. 43, 119-124; 1989, Berlin, Springer.
- (1989) Proceedings in Physics , vol.43 , pp. 119-124
- Nordquist P.E.R., Jr.¹ Lessoff, H.² Gorman, R.J.³ Gipe, M.L.⁴

96
- 36449006147
- Y. HIBI, Y. ENOMOTO, K. KIKUCHI, N. SHAKITA, and H. OGISO: Appl. Phys. Lett., 1995, 66, 817-818.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 817-818
- Hibi, Y.¹ Enomoto, Y.² Kikuchi, K.³ Shakita, N.⁴ Ogiso, H.⁵

97
- 0028388084
- J. S. SHOR and A. D. KURTZ: J. Electrochem. Soc., 1994, 141, 778-781.
- (1994) J. Electrochem. Soc. , vol.141 , pp. 778-781
- Shor, J.S.¹ Kurtz, A.D.²

98
- 84983149655
- Pennington, NJ, The Electrochemical Society
- X. G. ZHANG, J. S. SHOR, M. N. RUBERTO, M. T. SCHMIDT, and R. M. OSGOOD: Proc '12th State of the art program on compound semiconductors', 271-279; 1990, Pennington, NJ, The Electrochemical Society.
- (1990) Proc '12th State of the Art Program on Compound Semiconductors' , pp. 271-279
- Zhang, X.G.¹ Shor, J.S.² Ruberto, M.N.³ Schmidt, M.T.⁴ Osgood, R.M.⁵

99
- 0026845563
- J. S. SHOR, X. G. ZHANG, and R. M. OSGOOD: J. Electrochem. Soc., 1992, 139, 1213-1216.
- (1992) J. Electrochem. Soc. , vol.139 , pp. 1213-1216
- Shor, J.S.¹ Zhang, X.G.² Osgood, R.M.³

100
- 0027641129
- J. S. SHOR and R. M. OSGOOD: J. Electrochem. Soc., 1993, 140, L123-L125.
- (1993) J. Electrochem. Soc. , vol.140
- Shor, J.S.¹ Osgood, R.M.²

101
- 0032050502
- R. S. OKOJIE, A. A. NED, and A. D. KURTZ: Sens. Actuators A, 1998, 66, 200-204.
- (1998) Sens. Actuators A , vol.66 , pp. 200-204
- Okojie, R.S.¹ Ned, A.A.² Kurtz, A.D.³

102
- 0032595009
- N. RAJAN, M. MEHREGANY, C. A. ZORMAN, S. STEFANESCU, and T. P. KICHER: J. Microelectromech. Syst., 1999, 8, 251-257.
- (1999) J. Microelectromech. Syst. , vol.8 , pp. 251-257
- Rajan, N.¹ Mehregany, M.² Zorman, C.A.³ Stefanescu, S.⁴ Kicher, T.P.⁵

103
- 5544274244
- M. G. ALLEN, M. MEHREGANY, R. T. HOWE, and S. D. SENTURIA: Appl. Phys. Lett., 1987, 51, 241-243.
- (1987) Appl. Phys. Lett. , vol.51 , pp. 241-243
- Allen, M.G.¹ Mehregany, M.² Howe, R.T.³ Senturia, S.D.⁴

104
- 0025541504
- Hilton Head, SC, 4-7 June IEEE
- J. Y. PAN, P. LIN, F. MASEEH, and S. D. SENTURIA: Proc. 'IEEE solid state sensor and actuator workshop', Hilton Head, SC, 4-7 June 1990, IEEE, 70-73.
- (1990) Proc. 'IEEE Solid State Sensor and Actuator Workshop' , pp. 70-73
- Pan, J.Y.¹ Lin, P.² Maseeh, F.³ Senturia, S.D.⁴

105
- 0030846945
- M. MEHREGANY, L. TONG, L. G. MATUS, and D. J. LARKIN: IEEE Trans. Electron Devices, 1997, 44, 74-79.
- (1997) IEEE Trans. Electron Devices , vol.44 , pp. 74-79
- Mehregany, M.¹ Tong, L.² Matus, L.G.³ Larkin, D.J.⁴

106
- 0342718402
- Stockholm, Sweden, 25-29 June
- Y. YAMAGUCHI, H. NAGASAWA, T. SHOKI, and N. ANNAKA: Proc. 8th Int. Conf 'Solid state sensors and actuators, and eurosensors IX', Stockholm, Sweden, 25-29 June 1995, 86-188.
- (1995) Proc. 8th Int. Conf 'Solid State Sensors and Actuators, and Eurosensors IX' , pp. 86-188
- Yamaguchi, Y.¹ Nagasawa, H.² Shoki, T.³ Annaka, N.⁴

107
- 0010290255
- M. ITOH, M. HORI, H. KOMANO, and I. MORI: J. Vac. Sci. Technol. B, 1991, 9, 3262-3265.
- (1991) J. Vac. Sci. Technol. B , vol.9 , pp. 3262-3265
- Itoh, M.¹ Hori, M.² Komano, H.³ Mori, I.⁴

108
- 0039139635
- K. MUROOKA, I. HIGASHIKAWA, and Y. GOMEI: Appl. Phys. Lett., 1996, 69, 37-39.
- (1996) Appl. Phys. Lett. , vol.69 , pp. 37-39
- Murooka, K.¹ Higashikawa, I.² Gomei, Y.³

109
- 0013311973
- C. M. SU, A FEKADE, M. SPENCER, and M. WUTTIG: J. Appl. Phys., 1995, 77, 1280-1283.
- (1995) J. Appl. Phys. , vol.77 , pp. 1280-1283
- Su, C.M.¹ Fekade, A.² Spencer, M.³ Wuttig, M.⁴

110
- 0012637901
- C. M. SU, M. WUTTIG, A. FEKADE, and M. SPENCER: J. Appl. Phys., 1995, 77, 5611-5615.
- (1995) J. Appl. Phys. , vol.77 , pp. 5611-5615
- Su, C.M.¹ Wuttig, M.² Fekade, A.³ Spencer, M.⁴

111
- 0003553829
- New York, Academic Press
- A. S. NOWICK and B. S. BERRY: 'Anelastic relaxation in crystalline solids', 21; 1972, New York, Academic Press.
- (1972) Anelastic Relaxation in Crystalline Solids , pp. 21
- Nowick, A.S.¹ Berry, B.S.²

112
- 0000375672
- L. TONG, M. MEHREGANY, and L. G. MATUS: Appl. Phys. Lett., 1992, 60, 2992-2994.
- (1992) Appl. Phys. Lett. , vol.60 , pp. 2992-2994
- Tong, L.¹ Mehregany, M.² Matus, L.G.³

113
- 0022598669
- J. SUGIURA, W.-J. LU, K. C. CADIEN, and A. J. STECKL: J. Vac. Sci. Technol. B, 1986, 4, 349-354.
- (1986) J. Vac. Sci. Technol. B , vol.4 , pp. 349-354
- Sugiura, J.¹ Lu, W.-J.² Cadien, K.C.³ Steckl, A.J.⁴

114
- 0025249385
- W-S. PAN and A. J. STECKL: J. Electrochem. Soc., 1990, 137, 212-220.
- (1990) J. Electrochem. Soc. , vol.137 , pp. 212-220
- Pan, W.-S.¹ Steckl, A.J.²

115
- 0000600061
- A. J. FLEISCHMAN, C. A. ZORMAN, and M. MEHRIGANY: J. Vac. Sci. Technol. B, 1998, 16, 536-538.
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 536-538
- Fleischman, A.J.¹ Zorman, C.A.² Mehrigany, M.³

116
- 0031118287
- C. RICHTER, K. ESPERTSHUBER, C. WAGNER, M. EICKHOFF, and G. KROETZ: Mater. Sci. Eng. B, 1997, 46, 160-163.
- (1997) Mater. Sci. Eng. B , vol.46 , pp. 160-163
- Richter, C.¹ Espertshuber, K.² Wagner, C.³ Eickhoff, M.⁴ Kroetz, G.⁵

117
- 0027610378
- P. H. YIH and A. J. STECKL: J. Electrochem. Soc., 1993, 140, 1813-1824.
- (1993) J. Electrochem. Soc. , vol.140 , pp. 1813-1824
- Yih, P.H.¹ Steckl, A.J.²

118
- 0031122664
- W. RIECHERT, D. STEFAN, E. OBERMKIER, and W. WONDRAK: Mater. Sci. Eng. B, 1997, 46, 190-194.
- (1997) Mater. Sci. Eng. B , vol.46 , pp. 190-194
- Riechert, W.¹ Stefan, D.² Obermkier, E.³ Wondrak, W.⁴

119
- 0029358009
- P. H. YIH and A. J. STECKL: J. Electrochem. Soc., 1995, 142, 2853-2860.
- (1995) J. Electrochem. Soc. , vol.142 , pp. 2853-2860
- Yih, P.H.¹ Steckl, A.J.²

120
- 0029197075
- P. H. YIH and A. J. STECKL: J. Electrochem. Soc., 1995, 142, 312-319.
- (1995) J. Electrochem. Soc. , vol.142 , pp. 312-319
- Yih, P.H.¹ Steckl, A.J.²

121
- 0001166613
- A. J. STECKL and P. H. YIH: Appl. Phys. Lett., 1992, 60, 1966-1968.
- (1992) Appl. Phys. Lett. , vol.60 , pp. 1966-1968
- Steckl, A.J.¹ Yih, P.H.²

122
- 0029752063
- San Diego, CA, 11-15 February IEEE, New York
- A. J. FLEISCHMAN, S. ROY, C. A. ZORMAN, and M. MEHREGANY: Proc. '9th Annual international workshop on microelectro-mechanical systems', San Diego, CA, 11-15 February 1996, IEEE, New York, 234-238.
- (1996) Proc. '9th Annual International Workshop on Microelectro-mechanical Systems' , pp. 234-238
- Fleischman, A.J.¹ Roy, S.² Zorman, C.A.³ Mehregany, M.⁴

123
- 85031596018
- Orlando, FL, 17-21 January IEEE, New York
- A. A. YASEEN, C. H. WU, C. A. ZORMAN, and M. MEHREGANY: Proc. '12th Annual international conference on microelectro-mechanical systems', Orlando, FL, 17-21 January 1999, IEEE, New York, 644-649.
- (1999) Proc. '12th Annual International Conference on Microelectro-mechanical Systems' , pp. 644-649
- Yaseen, A.A.¹ Wu, C.H.² Zorman, C.A.³ Mehregany, M.⁴

124
- 0031701324
- A. J. FLEISCHMAN, S. ROY, C. A. ZORMAN, and M. MEHREGANY: Mater. Sci. Forum, 1998, 264-268, 889-892.
- (1998) Mater. Sci. Forum , vol.264-268 , pp. 889-892
- Fleischman, A.J.¹ Roy, S.² Zorman, C.A.³ Mehregany, M.⁴

125
- 0343152963
- Amorphous and crystalline silicon carbide III
- Berlin, Springer
- S. NISHINO, K. TAKAHASHI, H. ISHIDA, and J. SARAIE: 'Amorphous and crystalline silicon carbide III', Proceedings in Physics, Vol. 56, 295-300; 1992, Berlin, Springer.
- (1992) Proceedings in Physics , vol.56 , pp. 295-300
- Nishino, S.¹ Takahashi, K.² Ishida, H.³ Saraie, J.⁴

126
- 0000757467
- J. H. EDGAR, Y. GAO, J. CHAUDHURI, S. CHEEMA, S. A. CASALNUOVO, P. W. YIP, and M. V. SIDOROV: J. Appl. Phys., 1998, 84, 201-204.
- (1998) J. Appl. Phys. , vol.84 , pp. 201-204
- Edgar, J.H.¹ Gao, Y.² Chaudhuri, J.³ Cheema, S.⁴ Casalnuovo, S.A.⁵ Yip, P.W.⁶ Sidorov, M.V.⁷

127
- 0028449274
- A. J. STECKL, C. YUAN, Q.-Y. TONG, U. GOSELE, and M. J. LOBODA: J. Electrochem. Soc., 1994, 141, L66-L68.
- (1994) J. Electrochem. Soc. , vol.141
- Steckl, A.J.¹ Yuan, C.² Tong, Q.-Y.³ Gosele, U.⁴ Loboda, M.J.⁵

128
- 0040312149
- W. REICHERT, E. OBERMEIER, and J. STOEMENOS: Diam. Relat. Mater., 1997, 6, 1448-1450.
- (1997) Diam. Relat. Mater. , vol.6 , pp. 1448-1450
- Reichert, W.¹ Obermeier, E.² Stoemenos, J.³

129
- 0342718399
- J. M. BLUET, S. CONTRERAS-AZEMA, J. CAMASSEL, J. L. ROBERT, L. DICIOCCIO, W. REICHERT, R. LOSSY, E. OBERMEIER, and J. STOEMENOS: Mater. Sci. Eng. B, 1997, 46, 145- 155.
- (1997) Mater. Sci. Eng. B , vol.46 , pp. 145-155
- Bluet, J.M.¹ Contreras-Azema, S.² Camassel, J.³ Robert, J.L.⁴ Dicioccio, L.⁵ Reichert, W.⁶ Lossy, R.⁷ Obermeier, E.⁸ Stoemenos, J.⁹

130
- 0030572294
- L. DICIOCCIO, Y. LE TIEC, F. LETERTRE, C. JAUSSAUD, and M. BRUEL: Electron. Lett., 1996, 32, 1144-1145.
- (1996) Electron. Lett. , vol.32 , pp. 1144-1145
- Dicioccio, L.¹ Le Tiec, Y.² Letertre, F.³ Jaussaud, C.⁴ Bruel, M.⁵

131
- 0001613908
- L. DICIOCCIO, F. LETERTRE, Y. LE TIEC, A. M. PAPON, C. JAUSSAUD, and M. BRUEL: Mater. Sci. Eng. B, 1997, 46, 349-356.
- (1997) Mater. Sci. Eng. B , vol.46 , pp. 349-356
- Dicioccio, L.¹ Letertre, F.² Le Tiec, Y.³ Papon, A.M.⁴ Jaussaud, C.⁵ Bruel, M.⁶

132
- 0032545834
- Q.-Y. TONG, T. H. LEE, L. J. HUANG, Y. L. CHAO, and L. GOSELE: Electron. Lett., 1998, 34, 407-408.
- (1998) Electron. Lett. , vol.34 , pp. 407-408
- Tong, Q.-Y.¹ Lee, T.H.² Huang, L.J.³ Chao, Y.L.⁴ Gosele, L.⁵

133
- 0029196636
- Q.-Y. TONG, U. GOSELE, C. YUAN, A. J. STECKL, and M. REICHE: J. Electrochem. Soc:, 1995, 142, 232-236.
- (1995) J. Electrochem. Soc , vol.142 , pp. 232-236
- Tong, Q.-Y.¹ Gosele, U.² Yuan, C.³ Steckl, A.J.⁴ Reiche, M.⁵

134
- 0031139436
- Q.-Y. TONG, T.-H. LEE, P. WERNER, U. GOSELE, R. B. BERGMANN, and J. H. WERNER: J. Electrochem. Soc., 1997, 144, L111-L113.
- (1997) J. Electrochem. Soc. , vol.144
- Tong, Q.-Y.¹ Lee, T.-H.² Werner, P.³ Gosele, U.⁴ Bergmann, R.B.⁵ Werner, J.H.⁶

135
- 0032024344
- K. N. VINOD, C. A. ZORMAN, A. YASSEEN, and M. MEHREGANY: J. Electron. Mater., 1998, 27, L17-L20.
- (1998) J. Electron. Mater. , vol.27
- Vinod, K.N.¹ Zorman, C.A.² Yasseen, A.³ Mehregany, M.⁴

136
- 84992229644
- J.-P. COLINGE and R. W. BOWER: Mater. Res. Soc. Bull., 1998, 23, 13-44.
- (1998) Mater. Res. Soc. Bull. , vol.23 , pp. 13-44
- Colinge, J.-P.¹ Bower, R.W.²

137
- 0030673371
- Chicago, IL, IEEE, New York
- R. ZIERMANN, J. V. BERG, E. OBERMEIER, M. EICKHOFF, and G. KROETZ: Proc. Int. Conf. on 'Solid state sensors and actuators', Chicago, IL, 1997, IEEE, New York, 1411-1414.
- (1997) Proc. Int. Conf. on 'Solid State Sensors and Actuators' , pp. 1411-1414
- Ziermann, R.¹ Berg, J.V.² Obermeier, E.³ Eickhoff, M.⁴ Kroetz, G.⁵

138
- 0031702312
- L. DICIOCCIO, Y. LE TIEC, C. JAUSSAUD, E. HUGONNARD-BRUYERE, and M. BRUEL: Mater. Sci. Forum, 1998, 264-268, 765-770.
- (1998) Mater. Sci. Forum , vol.264-268 , pp. 765-770
- Dicioccio, L.¹ Le Tiec, Y.² Jaussaud, C.³ Hugonnard-Bruyere, E.⁴ Bruel, M.⁵

139
- 0041342833
- Sendai Japan, 7-10 June Institute of Electrical Engineers of Japan
- S. STEFANESCU, A. A. YASSEEN, C. A. ZORMAN, and M. MEHREGANY: Proc. 10th Int. Conf. 'Solid state sensors and actuators', Sendai Japan, 7-10 June 1999, Institute of Electrical Engineers of Japan, 194-197.
- (1999) Proc. 10th Int. Conf. 'Solid State Sensors and Actuators' , pp. 194-197
- Stefanescu, S.¹ Yasseen, A.A.² Zorman, C.A.³ Mehregany, M.⁴

140
- 0002856733
- A. F. FLANNERY, N. J. MOURLAS, C. W. STORMENT, S. TSAI, S. H. TAN, J. HECK, D. MONK, T. KIM, B. GOGOI, and G. T. A. KOVACS: Sens. Actuators A, 1998, 70, 48-55.
- (1998) Sens. Actuators A , vol.70 , pp. 48-55
- Flannery, A.F.¹ Mourlas, N.J.² Storment, C.W.³ Tsai, S.⁴ Tan, S.H.⁵ Heck, J.⁶ Monk, D.⁷ Kim, T.⁸ Gogoi, B.⁹ Kovacs, G.T.A.¹⁰

141
- 0005317013
- Columbus, OH, 9-11 November NSF/AFOSR/ASME
- B. BUSHAN, S. SUNDARARAJAN, X. LI, C. ZORMAN, and M. MEHREGANY: Proc. Workshop 'Tribological issues and opportunities in MEMS', Columbus, OH, 9-11 November 1997, NSF/AFOSR/ASME, 407-430.
- (1997) Proc. Workshop 'Tribological Issues and Opportunities in MEMS' , pp. 407-430
- Bushan, B.¹ Sundararajan, S.² Li, X.³ Zorman, C.⁴ Mehregany, M.⁵

142
- 0032473232
- N. RAJAN, C. A. ZORMAN, M. MEHREGANY, R. DEANNA, and R. HARVEY: Thin Solid Films, 1998, 315, 170-178.
- (1998) Thin Solid Films , vol.315 , pp. 170-178
- Rajan, N.¹ Zorman, C.A.² Mehregany, M.³ Deanna, R.⁴ Harvey, R.⁵

143
- 0032183430
- N. RAJAN, C. A. ZORMAN, M. MEHREGANY, R. DEANNA, and R. J. HARVEY: Surf. Coat. Technol., 1998, 108-109, 391-397.
- (1998) Surf. Coat. Technol. , vol.108-109 , pp. 391-397
- Rajan, N.¹ Zorman, C.A.² Mehregany, M.³ Deanna, R.⁴ Harvey, R.J.⁵

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