Aerospace applications of mass market MEMS products

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4698, Issue , 2002, Pages 497-508

  Bauer, K ^a   Krotz G ^a   Schalk, J ^a   Muller G ^a  

^a AIRBUS GROUP INNOVATIONS   (Germany)

Author keywords

Aerospace applications; Gas and flow sensing; Inertial sensing; Robust microsystems; SiC devices automotive applications

Indexed keywords

AEROSPACE APPLICATIONS; AUTOMOTIVE INDUSTRY; MICROELECTROMECHANICAL DEVICES; MICROSENSORS;

INERTIAL SENSING;

INTELLIGENT STRUCTURES;

EID: 0036031361     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.475096     Document Type: Conference Paper

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