Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals

Applied Physics Letters

Volumn 69, Issue 18, 1996, Pages 2653-2655

  Cleland, A N ^a   Roukes, M L ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001287420     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117548     Document Type: Article

References (11)

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7. D. S. Greywall et al., Phys. Rev. Lett. 72, 2992 (1994); D. S. Greywall, B. Yurke, P. A. Busch, and S. Arney, Europhys. Lett. 34, 37 (1996).
8. D. S. Greywall et al., Phys. Rev. Lett. 72, 2992 (1994); D. S. Greywall, B. Yurke, P. A. Busch, and S. Arney, Europhys. Lett. 34, 37 (1996).
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