Novel SiC on insulator technology using wafer bonding

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 653-656

  Vinod, Krishna N ^a   Zorman, Christian A ^a   Mehregany, Mehran ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; CRYSTAL DEFECTS; FILM GROWTH; SEMICONDUCTING SILICON COMPOUNDS; SILICA; SILICON CARBIDE; SILICON WAFERS; SINGLE CRYSTALS;

WAFER BONDING;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0030650746     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)