SCOPUS 정보 검색 플랫폼

Semiconductor Science and Technology

Volumn 27, Issue 7, 2012, Pages

Atomic-scale simulation of ALD chemistry

(1) Elliott, Simon D a

a UNIVERSITY COLLEGE CORK (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC-SCALE SIMULATIONS; ELEMENTARY STEPS; FIRST PRINCIPLES METHOD; HIGH-K DIELECTRIC; PRECURSOR ADSORPTION; REACTION MECHANISM; SEMICONDUCTOR PROCESSING;

ADSORPTION; DENSITY FUNCTIONAL THEORY; HAFNIUM OXIDES; NITRIDES;

ATOMIC LAYER DEPOSITION;

EID: 84862743446 PISSN: 02681242 EISSN: 13616641 Source Type: Journal
DOI: 10.1088/0268-1242/27/7/074008 Document Type: Article

Times cited : (101)

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