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Volumn 21, Issue 12, 2011, Pages 4197-4203
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Effect of hydration of the TiO2 anatase (101) substrate on the atomic layer deposition of alumina films
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Author keywords
[No Author keywords available]
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Indexed keywords
AB INITIO THERMODYNAMICS;
ALUMINA FILMS;
DEFECT SITES;
DENSITY FUNCTIONAL THEORY CALCULATIONS;
INITIAL PROCESS;
ISLAND GROWTH MODE;
METHYL GROUP;
NUCLEATION SEEDS;
TIO;
TRIMETHYLALUMINIUM;
WATER MOLECULE;
ADSORPTION;
ATOMIC LAYER DEPOSITION;
CALCULATIONS;
DEFECTS;
FUNCTIONAL GROUPS;
HYDRATION;
THERMODYNAMICS;
TITANIUM DIOXIDE;
DENSITY FUNCTIONAL THEORY;
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EID: 79952610109
PISSN: 09599428
EISSN: 13645501
Source Type: Journal
DOI: 10.1039/c0jm04095a Document Type: Article |
Times cited : (19)
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References (50)
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