SCOPUS 정보 검색 플랫폼

Chemical Physics Letters

Volumn 407, Issue 4-6, 2005, Pages 272-275

Atomic layer deposition of hafnium nitrides using ammonia and alkylamide precursors

(2) Xu, Ye a Musgrave, Charles B a

a Stanford University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ANALYSIS; ADSORPTION; AMMONIA; DEPOSITION; FILM GROWTH; HAFNIUM COMPOUNDS; ORGANIC COMPOUNDS; PHASE EQUILIBRIA; PLASTIC FILMS; THERMODYNAMIC STABILITY; VAPOR PRESSURE;

ATOMIC LAYER DEPOSITION; ATOMISTIC MECHANISMS; LIGAND-EXCHANGE MECHANISMS; PRECURSORS;

NITRIDES;

EID: 18244376110 PISSN: 00092614 EISSN: None Source Type: Journal
DOI: 10.1016/j.cplett.2005.03.084 Document Type: Article

Times cited : (12)

References (14)

1
- 0001394083
- P.A. Packan Science 285 1999 2079
- (1999) Science , vol.285 , pp. 2079
- Packan, P.A.¹

2
- 84974142609
- B.O. Johansson, H.T.G. Hentzell, J.M.E. Harper, and J.J. Cuomo J. Mater. Res. 1 1986 442
- (1986) J. Mater. Res. , vol.1 , pp. 442
- Johansson, B.O.¹ Hentzell, H.T.G.² Harper, J.M.E.³ Cuomo, J.J.⁴

3
- 0037766775
- H.Y. Yu, H.F. Lim, J.H. Chen, M.F. Li, C.X. Zhu, C.H. Tung, A.Y. Du, W.D. Wang, D.Z. Chi, and D.L. Kwong IEEE Electron Dev. Lett. 24 2003 230
- (2003) IEEE Electron Dev. Lett. , vol.24 , pp. 230
- Yu, H.Y.¹ Lim, H.F.² Chen, J.H.³ Li, M.F.⁴ Zhu, C.X.⁵ Tung, C.H.⁶ Du, A.Y.⁷ Wang, W.D.⁸ Chi, D.Z.⁹ Kwong, D.L.¹⁰

4
- 4444261663
- J.S. Becker, E. Kim, and R.G. Gordon Chem. Mater. 16 2004 3497
- (2004) Chem. Mater. , vol.16 , pp. 3497
- Becker, J.S.¹ Kim, E.² Gordon, R.G.³

5
- 0001488919
- T. Suntola, and J. Hyvarinen Ann. Rev. Mater. Sci. 15 1985 177
- (1985) Ann. Rev. Mater. Sci. , vol.15 , pp. 177
- Suntola, T.¹ Hyvarinen, J.²

6
- 0036799255
- D.M. Hausmann, E. Kim, J. Becker, and R.G. Gordon Chem. Mater. 14 2002 4350
- (2002) Chem. Mater. , vol.14 , pp. 4350
- Hausmann, D.M.¹ Kim, E.² Becker, J.³ Gordon, R.G.⁴

7
- 0000983812
- K. Kukli, M. Ritala, T. Sajavaara, J. Keinonen, and M. Leskela Chem. Vapor Depos. 8 2002 199
- (2002) Chem. Vapor Depos. , vol.8 , pp. 199
- Kukli, K.¹ Ritala, M.² Sajavaara, T.³ Keinonen, J.⁴ Leskela, M.⁵

8
- 0036677581
- Y. Widjaja, and C.B. Musgrave J. Chem. Phys. 117 2002 1931
- (2002) J. Chem. Phys. , vol.117 , pp. 1931
- Widjaja, Y.¹ Musgrave, C.B.²

9
- 18244394602
- J. Han, C.B. Musgrave, submitted
- J. Han, C.B. Musgrave, submitted

10
- 36449006464
- L.A. Eriksson, L.G.M. Pettersson, P.E.M. Siegbahn, and U. Wahlgren J. Chem. Phys. 102 1995 872
- (1995) J. Chem. Phys. , vol.102 , pp. 872
- Eriksson, L.A.¹ Pettersson, L.G.M.² Siegbahn, P.E.M.³ Wahlgren, U.⁴

11
- 33745770836
- P.J. Hay, and W.R. Wadt J. Chem. Phys. 82 1985 270
- (1985) J. Chem. Phys. , vol.82 , pp. 270
- Hay, P.J.¹ Wadt, W.R.²

12
- 27344448074
- P.J. Hay, and W.R. Wad J. Chem. Phys. 82 1985 299
- (1985) J. Chem. Phys. , vol.82 , pp. 299
- Hay, P.J.¹ Wad, W.R.²

13
- 0006073669
- W.R. Wadt, and P.J. Hay J. Chem. Phys. 82 1985 284
- (1985) J. Chem. Phys. , vol.82 , pp. 284
- Wadt, W.R.¹ Hay, P.J.²

14
- 0004133516
- Gaussian, Inc. Pittsburgh, PA
- M.J. Frisch Gaussian 98, revision A.5 1998 Gaussian, Inc. Pittsburgh, PA
- (1998) Gaussian 98, Revision A.5
- Frisch, M.J.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.