Mechanism and kinetics of thin zirconium and hafnium oxide film growth in an ALD reactor

Surface Science

Volumn 549, Issue 1, 2004, Pages 67-86

  Deminsky, Maxim ^a   Knizhnik, Andrei ^a   Belov, Ivan ^a   Umanskii, Stanislav ^a   Rykova, Elena ^a   Bagatur'yants, Alexander ^a   Potapkin, Boris ^a,b   Stoker, Matthew ^c   Korkin, Anatoli ^c  

^a Kinetic Technologies Ltd   (Russian Federation)

^b KURCHATOV INSTITUTE   (Russian Federation)

^c MOTOROLA INC   (United States)

Author keywords

Dielectric phenomena; Growth; Hafnium; Models of surface kinetics; Surface chemical reaction; Zirconium

Indexed keywords

AMORPHOUS MATERIALS; CHEMICAL VAPOR DEPOSITION; CHEMISORPTION; DIELECTRIC MATERIALS; HAFNIUM COMPOUNDS; MONTE CARLO METHODS; PROBABILITY DENSITY FUNCTION; SURFACE REACTIONS;

ADSORPTION ENERGY; HAFNIUM OXIDE FILMS;

ZIRCONIA;

EID: 0347604215     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2003.10.056     Document Type: Article

References (43)

1. Pietrogiacomi D., Indovina V., Pepe F., Tuti S. React. Kinet. Catal. Lett. 72:2001;35.
2. Hamada H., Inaba M., Imai H., Hirashima H., Kohama K. J. Sol-Gel Sci. Technol. 13:1998;1033.
3. Manchanda L., Morris M.D., Green M.L., van Dover R.B., Klemens F., Sorsch T.W., Silverman P.J., Wilk G., Busch B., Aravamudhan S. Microelectron. Eng. 59:2001;351.
4. Wilk G.D., Wallace R.M., Anthony J.M. J. Appl. Phys. 89:2001;5243.
5. Sneh O., Clark-Phelps R.B., Londergan A.R., Winkler J., Seidel T.E. Thin Solid Films. 402:2002;248.
6. Aarik J., Aidla A., Kiisler A.-A., Uustrate T., Sammelselg V. Thin Solid Films. 340:1999;110.
7. Aarik J., Aidla A., Mandar H., Uustrate T., Kukli K., Schuisky M. Appl. Surf. Sci. 173:2001;15.
8. Aarik J., Aidla A., Mandar H., Uustrate T., Sammelselg V. J. Cryst. Growth. 220:2000;105.
9. Siimon H., Aarik J. J. Phys. D: Appl. Phys. 30:1997;1725.
10. Aarik J., Aidla A., Mandar H., Uustrate T., Sammelselg V. Thin Solid Films. 408:2002;97.
11. Rahtu A., Ritala M. J. Mater. Chem. 12:2002;1484.
12. A. Kytokivi, Ph.D. Thesis, Helsinki University of Technology, Finland, 1997.
13. Kytokivi A., Lakomaa E.-L., Root A., Osterholm H., Jacobs J.-P., Brongersma H.H. Langmuir. 13:1997;2717.
14. Widjaja Y., Musgrave C.B. Appl. Phys. Lett. 81:2002;304.
15. Widjaja Y., Musgrave C.B. J. Chem. Phys. 117:2002;1931.
16. Orlando R., Pisani C., Ruiz E., Sauet P. Surf. Sci. 275:1992;482.
17. Haase F., Sauer J. J. Am. Chem. Soc. 120:1998;13503.
18. Merle-Mejean T., Barberis P., Ben Othmane S., Nardou F., Quintard P.E. J. Eur. Ceram. Soc. 18:1998;1579.
19. Cerrato C., Bordiga S., Barbera S., Morreta C. Surf. Sci. 377-379:1997;50.
20. Jung K.T., Bell A.T. J. Mol. Catal. A. 163:2000;27.
21. Ritala M., Leskelä M. Nalwa H.S. Handbook of Thin Film Materials. Deposition and Processing of Thin Films. vol. 1:2002;103 Academic Press.
22. Ylilammi M. Thin Solid Films. 279:1996;124.
23. Nawrocki J., Carr P.W., Annen M.J., Froelicher S. Anal. Chim. Acta. 327:1996;261.
24. Raz S., Sasaki K., Maier J., Riess I. Solid State Ionics. 143:2001;181.
25. Iskandarova I., Knizhnik A., Rykova E., Bagatur'yants A., Potapkin B., Korkin A. First-principle investigation of the hydroxylation of zirconia and hafnia surfaces. Microelectron. Eng. 69:2003;587.
26. Brodskii V.V., Rykova E.A., Bagatur'yants A.A., Korkin A.A. Comput. Mater. Sci. 24:2002;278.
27. Becke A.D. J. Chem. Phys. 98:1993;5648.
28. Lee C., Yang W., Parr R.G. Phys. Rev. B. 37:1988;785.
29. M.J. Frisch et al., Gaussian 98, Rev A.7, Gaussian, Inc., Pittsburgh, PA, 1998.
30. Hay P.J., Wadt W.R. J. Chem. Phys. 82:1985;270. 284.
31. Ditchfield R., Hehre W.J., Pople J.A. J. Chem. Phys. 54:1971;724.
32. Gordon M.S. Chem. Phys. Lett. 76:1980;163.
33. Shalashilin D.V., Thompson D.L. J. Chem. Phys. 107:1997;6204.
34. Nikitin E.E. Theory of Elementary Atomic and Molecular Processes in Gases. 1974;Clarendon, Oxford.
35. Gilbert R.G., Smith S.C. Theory of Unimolecular and Recombination Reactions. 1990;Blackwell, Oxford.
36. Goldsmith A., Waterman L.E., Hirschhorn L.E. Handbook of Thermophysical Properties of Solid Materials. 1961;Pergamon Press, Oxford.
37. Grigoriev I.S., Meilikhov E.Z. Fizicheskie Velichiny. Spravochnik (Physical Quantities: A Handbook). 1991;Energoatomizdat, Moscow.
38. Zhdanov V.P. Elementary Physicochemical Processes on Solid Surfaces. 1991;Plenum Press, New York.
39. Merle-Mejean T., Barberis P., Ben Othmane S., Nardou F., Quintard P.E. J. Eur. Ceram. Soc. 18:1998;1579.
40. Cerrato C., Bordiga S., Barbera S., Morreta C. Surf. Sci. 377/379:1997;50.
41. Quack M., Troe J. Ber. Buns. Phys. Chem. 81:1977;329.
42. Troe J. J. Chem. Phys. 75:1981;226.
43. Troe J. J. Chem. Phys. 79:1983;6017.