Developments of ALD processes: Experiments and thermodynamic evaluations

ECS Transactions

Volumn 33, Issue 2, 2010, Pages 321-332

  Blanquet, E ^a   Nuta, I ^a   Brize V ^a   Boichot, R ^a   Mantoux, A ^a   Violet, P ^a   Daniele, S ^b  

^a GRENOBLE INSTITUTE OF TECHNOLOGY   (France)

^b INST DE RECHERCHES SUR LA CATALYSE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; CHEMICAL VAPOR DEPOSITION; DECOMPOSITION; LIGANDS; MASS SPECTROMETRY; MOLECULES; ORGANOMETALLICS; OXYGEN; TANTALUM OXIDES; THERMODYNAMICS;

DECOMPOSITION PROCESS; KINETIC LIMITATIONS; LIGAND DECOMPOSITIONS; ORGANO-METALLIC MOLECULES; OXYGEN CONTAINING MOLECULES; STATISTICAL CALCULATIONS; THERMODYNAMIC EVALUATION; THERMODYNAMIC SIMULATIONS;

ATOMIC LAYER DEPOSITION;

EID: 79952564602     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3485268     Document Type: Conference Paper

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