Quantum chemical study of zirconium oxide deposition on the Si(100)-(2×1) surface

Journal of Physical Chemistry B

Volumn 107, Issue 35, 2003, Pages 9319-9324

  Widjaja, Yuniarto ^a   Han, Joseph H ^a   Musgrave, Charles B ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; DEPOSITION; DISSOCIATION; GROWTH (MATERIALS); HYDROGEN; PROBABILITY DENSITY FUNCTION; SEMICONDUCTING SILICON; STRUCTURE (COMPOSITION); WATER;

ACTIVATION BARRIER; ATOMIC LAYER DEPOSITION; REACTANTS;

ZIRCONIA;

EID: 0141459867     PISSN: 15206106     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp030257u     Document Type: Article

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