Influence of nitrogen substituent of amidinate ligands to the stability of Co(II) bis-amidinate ALD precursors

Acta Chimica Sinica

Volumn 66, Issue 2, 2008, Pages 165-169

  Li, Jia Ye ^a   Wu, Jin Ping ^a   Zhou, Cheng Gang ^a   Yao, Shu Juan ^a   Han, Bo ^a  

^a CHINA UNIVERSITY OF GEOSCIENCES   (China)

Author keywords

Atomic layer deposition; Bis amidinate; Density functional theory; Transition state

Indexed keywords

EID: 84862743919     PISSN: 05677351     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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