Micrometer and nanometer-scale parallel patterning of ceramic and organic-inorganic hybrid materials

Journal of the European Ceramic Society

Volumn 30, Issue 7, 2010, Pages 1555-1577

  ten Elshof, Johan E ^a   Khan, Sajid U ^a   Göbel, Ole F ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Ceramic; Moulding; Patterning; Soft lithography; Thin film

Indexed keywords

CERAMIC; CHEMICAL SOLUTIONS; HIGH-ASPECT RATIO; LATERAL RESOLUTION; LITHOGRAPHIC METHODS; NANO-METER-SCALE; ORGANIC-INORGANIC; ORGANIC-INORGANIC HYBRID MATERIALS; PATTERNING APPROACHES; PATTERNING METHODS; PATTERNING TECHNIQUES; SILSESQUIOXANES; SOFT LITHOGRAPHY; SURFACE MODIFICATION;

ASPECT RATIO; CERAMIC MATERIALS; HYBRID MATERIALS; MICROMETERS; MOLDING; OXIDE FILMS; SILICA; THIN FILM DEVICES; THIN FILMS;

FILM GROWTH;

EID: 77249133554     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2010.01.016     Document Type: Review

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