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Volumn 15, Issue 10, 2005, Pages 1683-1688

Pattern-transfer fidelity in soft lithography: The role of pattern density and aspect ratio

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; LASERS; LITHOGRAPHY; NANOSTRUCTURED MATERIALS; SCANNING;

PATTERN DENSITY; SCANNING-LINE SPACING; SOFT LITHOGRAPHY;

ELASTOMERS;

EID: 26844439282 PISSN: 1616301X EISSN: None Source Type: Journal
DOI: 10.1002/adfm.200400295 Document Type: Article

Times cited : (67)

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