Fabrication of three-dimensional micro-structures: microtransfer molding

Advanced Materials

Volumn 8, Issue 10, 1996, Pages 837-840

  Zhao, Xiao Mei ^a   Xia, Younan ^a   Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; ORGANIC POLYMERS; SEMICONDUCTOR DEVICE MANUFACTURE; SOLIDIFICATION; SURFACE STRUCTURE; TRANSFER MOLDING;

CONTOURED SURFACES; ELASTOMERIC MOLDS; MICROTRANSFER MOLDING; THREE DIMENSIONAL STRUCTURES;

SEMICONDUCTOR DEVICE STRUCTURES;

EID: 0030263409     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.19960081016     Document Type: Article

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